Plasma production using rotating mode radial line slot antennas with densely arrayed slots

2002 ◽  
Author(s):  
T. Yamamoto ◽  
M. Ono ◽  
M. Takahashi ◽  
M. Ando ◽  
N. Goto ◽  
...  
Keyword(s):  
Radial Line ◽  
Slot Antennas ◽  
Plasma Production

Large-area plasma excitation in densely arrayed radial line slot antennas using TE11 rotating mode

2004 ◽  
Vol 82 (6) ◽  
pp. 489-493
Author(s):  
T Yamamoto ◽  
N Ishii
Keyword(s):  
Large Diameter ◽  
Slot Antenna ◽  
Large Area ◽  
Radial Line ◽  
Slot Antennas ◽  
Plasma Production ◽  
Plasma Distribution ◽  
Feeding Structure ◽  
Plasma Excitation ◽  
Uniform Plasma

A novel feeding structure using a TE11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed and the possibility of control of the plasma distribution in the radial direction by changing to different coupling slot distributions is verified. PACS No.: 52.40.Fd

Dual circularly polarized radial line slot antennas

1995 ◽  
Vol 43 (8) ◽  
pp. 874-876 ◽  
Author(s):  
M. Takahashi ◽  
M. Ando ◽  
N. Goto ◽  
Y. Numano ◽  
M. Suzuki ◽  
...  
Keyword(s):  
Radial Line ◽  
Slot Antennas ◽  
Circularly Polarized

Dual circular polarized radial line slot antennas

2002 ◽  
Author(s):  
M. Takahashi ◽  
K. Yamamoto ◽  
M. Ando ◽  
N. Goto ◽  
Y. Numano ◽  
...  
Keyword(s):  
Radial Line ◽  
Slot Antennas
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