Bulk calibration method of micro-electromechanical system (MEMS) microphones

2021 ◽  
Vol 150 (2) ◽  
pp. 1402-1410
Author(s):  
Martin Chan ◽  
Christian Baker ◽  
Daniel Simmons ◽  
Mike Goldsmith
Keyword(s):  
Calibration Method ◽  
Electromechanical System ◽  
Mems Microphones ◽  
Micro Electromechanical System

A fractal micro-electromechanical system and its pull-in stability

2021 ◽  
pp. 146134842098404
Author(s):  
Dan Tian ◽  
Chun-Hui He
Keyword(s):  
Fractal Model ◽  
Electromechanical System ◽  
Normal Operation ◽  
Fractal Derivative ◽  
Operation Period ◽  
Micro Electromechanical System

Pull-in instability occurs in a micro-electromechanical system, and it greatly hinders its normal operation. A fractal modification is suggested to make the system stable in all operation period. A fractal model is established using a fractal derivative, and the results show that by suitable fabrication of the micro-electromechanical system device, the pull-in instability can be converted into a novel state of pull-in stability.

Fabrication of a Micro-Electromechanical System-Based Acetone Gas Sensor Using CeO2 Nanodot-Decorated WO3 Nanowires

2020 ◽  
Vol 12 (12) ◽  
pp. 14095-14104 ◽  
Author(s):  
Kaiping Yuan ◽  
Cheng-Yu Wang ◽  
Li-Yuan Zhu ◽  
Qi Cao ◽  
Jia-He Yang ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Electromechanical System ◽  
Micro Electromechanical System

A bionic micro-electromechanical system piezo-resistive vector hydrophone that suppresses vibration noise

2019 ◽  
Vol 29 (11) ◽  
pp. 115007
Author(s):  
Jinlong Song ◽  
Renxin Wang ◽  
Guojun Zhang ◽  
Zhenzhen Shang ◽  
Lansheng Zhang ◽  
...  
Keyword(s):  
Electromechanical System ◽  
Vector Hydrophone ◽  
Micro Electromechanical System ◽  
Vibration Noise

Design and TEM Simulation of a MEMS Based Microcantilever Cardiac Marker Sensor

2009 ◽  
Vol 1 (1) ◽  
Author(s):  
Sree Vidhya ◽  
Gideon Praveen Kumar ◽  
Lazar Mathew
Keyword(s):  
System Design ◽  
Dna Hybridization ◽  
Electromechanical System ◽  
Antigen Binding ◽  
Cardiac Marker ◽  
Important Principle ◽  
Micro Electromechanical System ◽  
Geometric Variation ◽  
Proportional Decrease ◽  
Simulation Package

Piezoresistive actuation of a microcantilever induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces exerted is small, increasing the sensitivity of the microcantilever becomes critical. In this paper, we are considering to achieve this by geometric variation in the cantilever. The sensitivity of the cantilever was improved so that the device can sense the presence of antigen even if the magnitude of surface-stresses over the microcantilever was very small. We consider a “T-shaped” cantilever that eliminates the disadvantages while improving the sensitivity simultaneously. Simulations for validation have been performed using INTELLISUITE software (a micro-electromechanical system design and simulation package). The simulations reveal that the T-shaped microcantilever is almost as sensitive as a thin cantilever and has relatively very low buckling effect. Simulations also reveal that with an increase in thickness of the cantilever, there is a proportional decrease in the sensitivity.

An on-chip micromagnet frictionometer based on magnetically driven colloids for nano-bio interfaces

Lab on a Chip ◽  
2016 ◽  
Vol 16 (18) ◽  
pp. 3485-3492 ◽  
Author(s):  
Xinghao Hu ◽  
Sandhya Rani Goudu ◽  
Sri Ramulu Torati ◽  
Byeonghwa Lim ◽  
Kunwoo Kim ◽  
...  
Keyword(s):  
Frictional Force ◽  
Electromechanical System ◽  
Magnetic Forces ◽  
Novel Method ◽  
On Chip ◽  
Micro Electromechanical System

A novel method based on remotely controlled magnetic forces of bio-functionalized superparamagnetic colloids using micromagnet arrays was devised to measure frictional force at the sub-picoNewton (pN) scale for bio-nano-/micro-electromechanical system (bio-NEMS/MEMS) interfaces in liquid.

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