A surface acoustic wave hygrometer for high‐resolution measurements of atmospheric humidity

2000 ◽  
Vol 108 (5) ◽  
pp. 2495-2495
Author(s):  
Michael E. Hoenk ◽  
Greg Cardell ◽  
Flavio Noca ◽  
Robert K. Watson
Keyword(s):  
High Resolution ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Atmospheric Humidity

scholarly journals High-resolution, high-linearity temperature sensor using surface acoustic wave device based on LiNbO3/SiO2/Si substrate

AIP Advances ◽  
2016 ◽  
Vol 6 (9) ◽  
pp. 095317 ◽  
Author(s):  
Xiang-Guang Tian ◽  
Heng Liu ◽  
Lu-Qi Tao ◽  
Yi Yang ◽  
Hanjun Jiang ◽  
...  
Keyword(s):  
High Resolution ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Temperature Sensor ◽  
Si Substrate ◽  
High Linearity ◽  
Surface Acoustic Wave Device ◽  
Acoustic Wave Device ◽  
Wave Device
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