High resolution visualization of acoustic wave fields within surface acoustic wave devices

T. Hesjedal; E. Chilla; H.-J. Fröhlich

doi:10.1063/1.119323

High resolution visualization of acoustic wave fields within surface acoustic wave devices

Applied Physics Letters ◽

10.1063/1.119323 ◽

1997 ◽

Vol 70 (11) ◽

pp. 1372-1374 ◽

Cited By ~ 16

Author(s):

T. Hesjedal ◽

E. Chilla ◽

H.-J. Fröhlich

Keyword(s):

High Resolution ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Wave Fields ◽

Acoustic Wave Devices

Download Full-text

High-resolution technology for silicon-integrated surface acoustic wave devices

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.584646 ◽

1989 ◽

Vol 7 (6) ◽

pp. 2048 ◽

Cited By ~ 2

Author(s):

B. M. Blok

Keyword(s):

High Resolution ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Acoustic Wave Devices

Download Full-text

High resolution technology for surface acoustic wave devices monolithically integrated with electronic circuitry

Microelectronic Engineering ◽

10.1016/0167-9317(90)90078-8 ◽

1990 ◽

Vol 11 (1-4) ◽

pp. 87-91

Author(s):

A.J.M. van der Harg ◽

J.H. Visser ◽

E. van der Drift ◽

J. Romijn

Keyword(s):

High Resolution ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Monolithically Integrated ◽

Electronic Circuitry ◽

Acoustic Wave Devices

Download Full-text

High resolution acoustic field imaging applied to surface acoustic wave devices

1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102) ◽

10.1109/ultsym.1998.762142 ◽

2002 ◽

Author(s):

G. Behme ◽

M. Blocker ◽

E. Bigler ◽

T. Hesjedal ◽

H.-J. Frohlich

Keyword(s):

High Resolution ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Acoustic Field ◽

Acoustic Wave Devices ◽

Field Imaging

Download Full-text

The Temperature Coefficients of Frequency of Surface Acoustic Wave Devices with SiOxNy Passivation Films on LiTaO3 Substrates

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2020.3048030 ◽

2020 ◽

pp. 1-1

Author(s):

Atsushi Nishimura ◽

Satoru Matsuda ◽

Yoshiro Kabe

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Temperature Coefficients ◽

Acoustic Wave Devices

Download Full-text

High-Performance Surface Acoustic Wave Devices Using LiNbO₃/SiO₂/SiC Multilayered Substrates

IEEE Transactions on Microwave Theory and Techniques ◽

10.1109/tmtt.2021.3077261 ◽

2021 ◽

pp. 1-1

Author(s):

Junyao Shen ◽

Sulei Fu ◽

Rongxuan Su ◽

Huiping Xu ◽

Zengtian Lu ◽

...

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

High Performance ◽

Acoustic Wave Devices ◽

Performance Surface

Download Full-text

Method of frequency trimming surface acoustic wave devices

The Journal of the Acoustical Society of America ◽

10.1121/1.392694 ◽

1985 ◽

Vol 78 (5) ◽

pp. 1932-1932

Author(s):

Elio Mariani ◽

Arthur Ballato

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Acoustic Wave Devices ◽

Frequency Trimming

Download Full-text

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

Analytical Methods ◽

10.1039/c7ay00690j ◽

2017 ◽

Vol 9 (28) ◽

pp. 4112-4134 ◽

Cited By ~ 56

Author(s):

David B. Go ◽

Massood Z. Atashbar ◽

Zeinab Ramshani ◽

Hsueh-Chia Chang

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Chemical Sensing ◽

Chemical Detection ◽

Microfluidic Platforms ◽

Acoustic Wave Sensors ◽

Acoustic Wave Devices ◽

Wave Sensors

Surface acoustic wave sensors and microfluidic platforms enable effective chemical detection and sample manipulation.

Download Full-text

Bias Stable Zinc Oxide-On-Silicon Surface Acoustic Wave Devices

10.1109/ultsym.1981.197728 ◽

1981 ◽

Cited By ~ 4

Author(s):

R.D. Cherne ◽

M.R. Melloch ◽

R.L. Cunshor ◽

R.F. Pierret

Keyword(s):

Zinc Oxide ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Silicon Surface ◽

Acoustic Wave Devices

Download Full-text

SiO2film overlays for temperature−stable surface acoustic wave devices

Applied Physics Letters ◽

10.1063/1.88076 ◽

1975 ◽

Vol 26 (3) ◽

pp. 75-77 ◽

Cited By ~ 36

Author(s):

T. E. Parker ◽

M. B. Schulz

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Stable Surface ◽

Acoustic Wave Devices

Download Full-text

Rigorous electrostatic field analysis of surface acoustic wave devices with closed-form formulae: A two-dimensional representation

[1991 Proceedings] 6th Mediterranean Electrotechnical Conference ◽

10.1109/melcon.1991.161802 ◽

2002 ◽

Author(s):

H.P. Reichinger ◽

A.R. Baghai-Wadji

Keyword(s):

Acoustic Wave ◽

Closed Form ◽

Surface Acoustic Wave ◽

Electrostatic Field ◽

Field Analysis ◽

Two Dimensional ◽

Dimensional Representation ◽

Acoustic Wave Devices

Download Full-text