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Xenon and Tin Pinch Discharge Sources
EUV Sources for Lithography
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10.1117/3.613774.ch16
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2010
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pp. 477-504
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Cited By ~ 6
Author(s):
Vladimir Borisov
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Andrey Demin
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Alexander Eltsov
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Alexander Ivanov
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Yuriy Kiryukhin
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...
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