Direct phase-shift measurement of thin and thick absorber EUV masks

2012 ◽  
Author(s):  
Tetsunori Murachi ◽  
Hiroyoshi Tanabe ◽  
Seh-Jin Park ◽  
Eric Gullikson ◽  
Taichi Ogase ◽  
...  
Keyword(s):  
Phase Shift ◽  
Shift Measurement ◽  
Thick Absorber

Direct phase-shift measurement of an EUV mask with gradient absorber thickness

2013 ◽  
Author(s):  
Hiroyoshi Tanabe ◽  
Tetsunori Murachi ◽  
Seh-Jin Park ◽  
Eric M. Gullikson ◽  
Tsukasa Abe ◽  
...  
Keyword(s):  
Phase Shift ◽  
Absorber Thickness ◽  
Shift Measurement

CMUT Time of Flight Gas Sensor By Phase Shift Measurement

2020 ◽  
Vol MA2020-01 (31) ◽  
pp. 2323-2323
Author(s):  
Luis Iglesias ◽  
Priyadarshini Shanmugam ◽  
Jean-François Michaud ◽  
Daniel Alquier ◽  
Dominique Certon ◽  
...  
Keyword(s):  
Phase Shift ◽  
Gas Sensor ◽  
Time Of Flight ◽  
Shift Measurement

Automatic system for phase shift measurement using correlation

1999 ◽  
Author(s):  
H. Gonzalez-Gonzalez ◽  
D. A. May-Arrioja ◽  
M. A. Meneses-Nava ◽  
Eduardo Tepichin-Rodriguez ◽  
Jose Javier Sanchez-Mondragon
Keyword(s):  
Phase Shift ◽  
Automatic System ◽  
Shift Measurement

High-speed and high-precision torsion sensor based on polarization-induced microwave photonic phase shift measurement

2019 ◽  
Vol 44 (14) ◽  
pp. 3462
Author(s):  
Bin Wang ◽  
Weifeng Zhang ◽  
Xinyu Fan ◽  
Jianping Yao
Keyword(s):  
Phase Shift ◽  
High Precision ◽  
High Speed ◽  
Shift Measurement ◽  
Microwave Photonic

Quantitative effective atomic number imaging using simultaneous x-ray absorption and phase shift measurement

2011 ◽  
Vol 98 (11) ◽  
pp. 111902 ◽  
Author(s):  
Taihei Mukaide ◽  
Masatoshi Watanabe ◽  
Kazuhiro Takada ◽  
Atsuo Iida ◽  
Kazunori Fukuda ◽  
...  
Keyword(s):  
Phase Shift ◽  
Atomic Number ◽  
Effective Atomic Number ◽  
Shift Measurement ◽  
X Ray ◽  
X Ray Absorption
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