Nanometrology And Super-Resolution Imaging Of Oxide Isolation Structures Using A Confocal Scanning Laser Microscope
1989 ◽
Vol 47
◽
pp. 146-147
1990 ◽
Vol 157
(1)
◽
pp. 21-27
◽
1994 ◽
Vol 175
(3)
◽
pp. 229-237
◽