Effects Of Reflected Background Radiation On Radiometric Temperature Measurement

1980 ◽  
Author(s):  
William L. Wolfe
Keyword(s):  
Temperature Measurement ◽  
Background Radiation ◽  
Radiometric Temperature Measurement

Altering Spectrum Method in Temperature Measurement Using Infrared Imager in Complex Background Environment

2012 ◽  
Vol 479-481 ◽  
pp. 348-351 ◽  
Author(s):  
Zhen Yang ◽  
Shi Cheng Zhang ◽  
Li Yang
Keyword(s):  
Temperature Measurement ◽  
Background Radiation ◽  
High Accuracy ◽  
Measured Object ◽  
Spectrum Method ◽  
Complex Background ◽  
Infrared Imager ◽  
Iterative Equations ◽  
Infrared Temperature Measurement ◽  
Simulation Results

To improve the accuracy of temperature measurement using infrared imager in complex background environment, based on the principles and the formulas of temperature measurement using infrared imager, altering spectrum method in the infrared temperature measurement was derived. For the temperature measurement of gray body in complex background environment, three response bands should be selected in temperature measurement, and then the surface temperature could be obtained by solving responding two iterative equations. This method could be achieved technologically by two means: setting filters in front of infrared imager, or using infrared imagers with different bands. The simulation results show that the temperature of measured object could be obtained with high accuracy through the method, and its error is very small. Through this method, the temperature of measured object could be obtained without knowing its emissivity and background radiation, so the error caused by the measurement of the emissivity of measured object and background radiation could be reduced.

Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at Nist

1998 ◽  
Vol 525 ◽  
Author(s):  
F. J. Lovas ◽  
B. K. Tsai ◽  
C. E. Gibson
Keyword(s):  
Uncertainty Analysis ◽  
Temperature Measurement ◽  
Line Width ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Temperature Calibration ◽  
Technical Challenge ◽  
Technology Roadmap ◽  
Radiometric Temperature Measurement ◽  
National Technology

ABSTRACTAlthough radiometric temperature measurement in rapid thermal processing (RTP) tools has substantially improved in terms of repeatability and uniformity, it still remains a technical challenge. The 1999 requirements of 180 nm line width technology in the 1997 National Technology Roadmap for Semiconductors (NTRS) imply an uncertainty of ± 2 °C in temperature measurement, which will continue the challenge in temperature measurement. In this paper we will discuss the NIST absolute radiometric temperature calibration, measurements, and uncertainty analysis.

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