Waves Behaviour In A High Repetition High Average Power Excimer Laser

1989 ◽  
Author(s):  
L. Arif ◽  
P. Canarelli ◽  
Ph. Delaporte ◽  
B. Fontaine ◽  
B. Forestier ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Average Power ◽  
High Average Power ◽  
High Repetition

Study of high-average-power excimer laser with circulation loop

1991 ◽  
Author(s):  
Bruno Godard ◽  
Emmanuel Estocq ◽  
Marc X. Stehle ◽  
Jean C. Bonnet ◽  
Daniel R. Pigache
Keyword(s):  
Excimer Laser ◽  
Average Power ◽  
Circulation Loop ◽  
High Average Power

Limitations of a high average power excimer laser by acoustic or shock waves

1990 ◽  
Author(s):  
M. Bessafi ◽  
P. Canarelli ◽  
B. L. Fontaine ◽  
B. M. Forestier ◽  
Ph. C. Delaporte ◽  
...  
Keyword(s):  
Shock Waves ◽  
Excimer Laser ◽  
Average Power ◽  
High Average Power

High-average-power, high-repetition-rate dual signal optical parametric oscillator based on PPMgLN

2010 ◽  
Vol 8 (5) ◽  
pp. 505-507 ◽  
Author(s):  
纪峰 Feng Ji ◽  
卢荣胜 Rongsheng Lu ◽  
李保生 Baosheng Li ◽  
张百钢 Baigang Zhang ◽  
姚建铨 Jianquan Yao
Keyword(s):  
Optical Parametric Oscillator ◽  
Repetition Rate ◽  
Average Power ◽  
High Repetition Rate ◽  
Parametric Oscillator ◽  
High Average Power ◽  
High Repetition ◽  
Optical Parametric

High Repetition and High Average Power Nd:YAG Laser for EUV Lithography

2008 ◽  
Author(s):  
Hisanori Fujita ◽  
Masahiro Nakatsuka ◽  
Ravi Bhushan ◽  
Koji Tsubakimoto ◽  
Hidetsugu Yoshida ◽  
...  
Keyword(s):  
Nd:Yag Laser ◽  
Average Power ◽  
High Average Power ◽  
High Repetition ◽  
Euv Lithography

High average power LD pumped Yb:YAG regenerative amplifier at high repetition rates

2006 ◽  
Author(s):  
K. Sueda ◽  
S. Kawato ◽  
S. Matsubara ◽  
A. Takazawa ◽  
K. Akagawa ◽  
...  
Keyword(s):  
Average Power ◽  
High Average Power ◽  
Regenerative Amplifier ◽  
High Repetition

High-repetition-rate high-average-power 300-fs KrF/Ti:sapphire hybrid laser

1996 ◽  
Vol 21 (9) ◽  
pp. 647 ◽  
Author(s):  
Y. Nabekawa ◽  
K. Sajiki ◽  
D. Yoshitomi ◽  
K. Kondo ◽  
S. Watanabe
Keyword(s):  
Repetition Rate ◽  
Average Power ◽  
High Repetition Rate ◽  
High Average Power ◽  
High Repetition

A high average power excimer laser

1983 ◽  
Author(s):  
Robert R. Butcher ◽  
Roger A. Tennant ◽  
George F. Erickson ◽  
Steven L. Swisher ◽  
Walter L. Willis ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Average Power ◽  
High Average Power
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