X-Ray Lithography At The Stanford Synchrotron Radiation Laboratory (SSRL)

Mapping Intimacies ◽

10.1117/12.947487 ◽

1985 ◽

Cited By ~ 1

Author(s):

P. Pianetta ◽

R. Redaelli ◽

R. Jaeger ◽

T. W. Barbee, Jr.

Keyword(s):

Synchrotron Radiation ◽

X Ray ◽

Stanford Synchrotron Radiation Laboratory ◽

Radiation Laboratory

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A general purpose sub-keV X-ray facility at the Stanford Synchrotron Radiation Laboratory

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment ◽

10.1016/0168-9002(90)90113-k ◽

1990 ◽

Vol 291 (1-2) ◽

pp. 511-517 ◽

Cited By ~ 39

Author(s):

K.Glenn Tirsell ◽

Victor P. Karpenko

Keyword(s):

Synchrotron Radiation ◽

General Purpose ◽

X Ray ◽

Stanford Synchrotron Radiation Laboratory ◽

Radiation Laboratory

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Design considerations for the X-ray lithography station at the Stanford synchrotron radiation laboratory

Nuclear Instruments and Methods in Physics Research ◽

10.1016/0167-5087(84)90558-1 ◽

1984 ◽

Vol 222 (1-2) ◽

pp. 355-358 ◽

Cited By ~ 4

Author(s):

P. Pianetta ◽

R. Tatchyn ◽

R. Jaeger ◽

T.W. Barbee

Keyword(s):

Synchrotron Radiation ◽

X Ray ◽

Design Considerations ◽

Stanford Synchrotron Radiation Laboratory ◽

Radiation Laboratory

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SOFT X-RAY FACILITIES OF THE STANFORD SYNCHROTRON RADIATION LABORATORY

Annals of the New York Academy of Sciences ◽

10.1111/j.1749-6632.1980.tb47203.x ◽

1980 ◽

Vol 342 (1 Ultrasoft X-R) ◽

pp. 3-21 ◽

Cited By ~ 1

Author(s):

William K. Warburton

Keyword(s):

Synchrotron Radiation ◽

X Ray ◽

Stanford Synchrotron Radiation Laboratory ◽

Radiation Laboratory

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Hazards analysis for the E.O. Lawrence Berkeley National Laboratory x-ray absorption experiments to be performed at Stanford Synchrotron Radiation Laboratory

10.2172/238580 ◽

1995 ◽

Author(s):

N.M. Edelstein ◽

D.K. Shuh ◽

J.B. Bucher

Keyword(s):

Synchrotron Radiation ◽

National Laboratory ◽

Lawrence Berkeley National Laboratory ◽

X Ray ◽

Stanford Synchrotron Radiation Laboratory ◽

Radiation Laboratory ◽

X Ray Absorption

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Small‐angle x‐ray scattering/diffraction system for studies of biological and other materials at the Stanford Synchrotron Radiation Laboratory (abstract)a)

Review of Scientific Instruments ◽

10.1063/1.1143201 ◽

1992 ◽

Vol 63 (1) ◽

pp. 1068-1068

Author(s):

S. Wakatsuki ◽

K. O. Hodgson ◽

D. Eliezer ◽

M. Rice ◽

S. Hubbard ◽

...

Keyword(s):

Synchrotron Radiation ◽

Small Angle ◽

X Ray ◽

X Ray Scattering ◽

Stanford Synchrotron Radiation Laboratory ◽

Radiation Laboratory ◽

Ray Scattering

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X-Ray Lithography Station At The Stanford Synchrotron Radiation Laboratory (SSRL)

10.1117/12.939207 ◽

1984 ◽

Author(s):

P Pianetta ◽

R Tatchyn ◽

R Jaeger ◽

T W. Barbee, Jr.

Keyword(s):

Synchrotron Radiation ◽

X Ray ◽

Title X ◽

Stanford Synchrotron Radiation Laboratory ◽

Radiation Laboratory

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Hard X-ray Sputtered-Sliced Phase Zone Plates

MRS Proceedings ◽

10.1557/proc-307-343 ◽

1993 ◽

Vol 307 ◽

Cited By ~ 1

Author(s):

Richard M. Bionta ◽

Kenneth M. Skulina

Keyword(s):

Synchrotron Radiation ◽

Focal Length ◽

Phase Zone ◽

X Ray ◽

Zone Plates ◽

Stanford Synchrotron Radiation Laboratory ◽

Radiation Laboratory

ABSTRACTAl/Cu sputtered-sliced phase zone plates, designed to operate with a focal length of 0.18 m and 1.12 m at 8.05 keV, were tested at the Stanford Synchrotron Radiation Laboratory. The results of lens characterization and the implementation of a microscope are reported.

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