Mechanism Of Crystal Growth Of GaAs In Chemical Vapor Deposition (CVD)

1987 ◽  
Author(s):  
Jun-ichi Nishizawa ◽  
Hidenori Shimawaki ◽  
Toru Kurabayashi ◽  
Masakazu Kimura
Keyword(s):  
Chemical Vapor Deposition ◽  
Crystal Growth ◽  
Vapor Deposition ◽  
Chemical Vapor

Optical Approaches to Real-Time Analysis and Control of Crystal Growth

1990 ◽  
Vol 198 ◽  
Author(s):  
D. E. Aspnes
Keyword(s):  
Chemical Vapor Deposition ◽  
Crystal Growth ◽  
Molecular Beam Epitaxy ◽  
Real Time ◽  
Vapor Deposition ◽  
Molecular Beam ◽  
Second Harmonic ◽  
Chemical Vapor ◽  
Optical Methods ◽  
Dielectric Anisotropy

ABSTRACTA variety of optical methods are now available for studying surface processes and for monitoring layer thicknesses and compositions during semiconductor crystal growth by molecular beam epitaxy (MBE), organometallic chemical vapor deposition (OMCVD), and related techniques. Spectroellipsometry (SE) and spectroreflectometry (SR), the older, primarily bulk-sensitive probes, are now augmented by new, primarily surface-sensitive probes such as reflectance-difference spectroscopy (RDS), second-harmonic generation (SHG), and laser light scattering (LLS). Examples of real-time growth studies now include SE determinations of thicknesses and compositions of AlxGa1–xAs layers on GaAs by organometallic molecular beam epitaxy (OMMBE) to 10 Å thickness scales, RDS determinations of surface dielectric anisotropy spectra of various (001) GaAs surfaces relevant to crystal growth by MBE, and LLS determinations of the evolution of surface roughness during chemical vapor deposition (CVD) growth on Si. Proven capabilities suggest new applications, particularly to growth-interrupted and metastable systems.

Carbon Nanotube-Directed Polytetrafluoroethylene Crystal Growth via Initiated Chemical Vapor Deposition

2012 ◽  
Vol 34 (3) ◽  
pp. 251-256 ◽  
Author(s):  
Eric D. Laird ◽  
Ranjita K. Bose ◽  
Wenda Wang ◽  
Kenneth K. S. Lau ◽  
Christopher Y. Li
Keyword(s):  
Chemical Vapor Deposition ◽  
Crystal Growth ◽  
Carbon Nanotube ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Initiated Chemical Vapor Deposition
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