Laser-Induced Crystal Growth Measurements By Time-Resolved Optical Reflectivity

Author(s):  
G. L. Olson ◽  
S. A. Kokorowski ◽  
J. A. Roth ◽  
R. S. Turley ◽  
L. D. Hess
1980 ◽  
Vol 1 ◽  
Author(s):  
G.L. Olson ◽  
S.A. Kokorowski ◽  
J.A. Roth ◽  
L.D. Hess

ABSTRACTWe report the use of time-resolved optical reflectivity to directly monitor the dynamics of cw laser-induced solid phase epitaxy (SPE) of thin films. This in situ measurement technique utilizes optical interference effects between light reflected from the surface of a sample and from an advancing interface to provide continuous temporal and spatial resolution of crystal growth processes. SPE growth rates of ionimplanted films which are five orders of magnitude faster than previously observed can be induced and accurately measured with the laser method. Arsenic enhances the SPE rate, and spatially resolved measurements show that the growth rate for arsenic implanted films varies in accordance with the ionimplantation profile. Results are reported for silicon selfimplanted samples with and without subsequent arsenic ion implantation, and for silicon samples directly implanted with arsenic.


2018 ◽  
Vol 11 (9) ◽  
pp. 095802 ◽  
Author(s):  
Xu-Chen Nie ◽  
Hai-Ying Song ◽  
Xiu Zhang ◽  
Shi-Bing Liu ◽  
Fan Li ◽  
...  

1980 ◽  
Vol 37 (11) ◽  
pp. 1019-1021 ◽  
Author(s):  
G. L. Olson ◽  
S. A. Kokorowski ◽  
R. A. McFarlane ◽  
L. D. Hess

2011 ◽  
Vol 23 (8) ◽  
pp. 2130-2141 ◽  
Author(s):  
Janosch Cravillon ◽  
Roman Nayuk ◽  
Sergej Springer ◽  
Armin Feldhoff ◽  
Klaus Huber ◽  
...  

Lab on a Chip ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 2954-2964
Author(s):  
Mark A. Levenstein ◽  
Yi-Yeoun Kim ◽  
Liam Hunter ◽  
Clara Anduix-Canto ◽  
Carlos González Niño ◽  
...  

Exploration of crystal growth in microchannels led to effective scale inhibition, enabling time-resolved injector-based serial crystallography-on-a-chip.


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