A next-generation EMF simulator for EUV lithography based on the pseudo-spectral time-domain method

2012 ◽  
Author(s):  
Michael S. Yeung
Keyword(s):  
Time Domain ◽  
Time Domain Method ◽  
Next Generation ◽  
Domain Method ◽  
Euv Lithography ◽  
Pseudo Spectral

A Hybrid Fast Multipole Pseudo-Spectral Time Domain Method

2008 ◽  
Vol 56 (5) ◽  
pp. 1394-1401 ◽  
Author(s):  
B. L. Ooi ◽  
Y. J. Fan ◽  
Hristo D. Hristov ◽  
Rodolfo Feick ◽  
Xuechuan Shan ◽  
...  
Keyword(s):  
Time Domain ◽  
Time Domain Method ◽  
Fast Multipole ◽  
Domain Method ◽  
Pseudo Spectral

scholarly journals A solver based on pseudo-spectral analytical time-domain method for the two-fluid plasma model

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
B. Morel ◽  
R. Giust ◽  
K. Ardaneh ◽  
F. Courvoisier
Keyword(s):  
Electromagnetic Wave ◽  
Time Domain ◽  
Time Domain Method ◽  
Plasma Model ◽  
Conservation Of Energy ◽  
Domain Method ◽  
Analytical Time ◽  
Pseudo Spectral ◽  
Two Fluid ◽  
Two Fluid Plasma

AbstractA number of physical processes in laser-plasma interaction can be described with the two-fluid plasma model. We report on a solver for the three-dimensional two-fluid plasma model equations. This solver is particularly suited for simulating the interaction between short laser pulses with plasmas. The fluid solver relies on two-step Lax–Wendroff split with a fourth-order Runge–Kutta scheme, and we use the Pseudo-Spectral Analytical Time-Domain (PSATD) method to solve Maxwell’s curl equations. Overall, this method is only based on finite difference schemes and fast Fourier transforms and does not require any grid staggering. The Pseudo-Spectral Analytical Time-Domain method removes the numerical dispersion for transverse electromagnetic wave propagation in the absence of current that is conventionally observed for other Maxwell solvers. The full algorithm is validated by conservation of energy and momentum when an electromagnetic pulse is launched onto a plasma ramp and by quantitative agreement with wave conversion of p-polarized electromagnetic wave onto a plasma ramp.

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