Pattern density multiplication by direct self assembly of block copolymers: toward 300mm CMOS requirements

Author(s):  
R. Tiron ◽  
X. Chevalier ◽  
S. Gaugiran ◽  
J. Pradelles ◽  
H. Fontaine ◽  
...  
2015 ◽  
Vol 1750 ◽  
Author(s):  
Raluca Tiron ◽  
Xavier Chevalier ◽  
Ahmed Gharbi ◽  
Maxime Argoud ◽  
Patricia Pimenta-Barros ◽  
...  

ABSTRACTDensity multiplication of patterned templates by directed self-assembly (DSA) of block copolymers (BCP) stands out as a promising alternative to overcome the limitation of conventional lithography. Using the 300mm pilot line available in LETI and Arkema’s materials, the main objective is to integrate DSA directly into the conventional CMOS lithography process in order to achieve high resolution and pattern density multiplication at a low cost. Thus we investigate the potential of DSA to address contact and via level patterning by performing either CD shrink or contact multiplication. Our approach is based on the graphoepitaxy of PS-b-PMMA block copolymers. Lithographic performances of block copolymers are evaluated both for contact shrink and contact doubling. Furthermore, advanced characterization technics are used to monitor in-film self-assembly process. These results show that DSA has a high potential to be integrated directly into the conventional CMOS lithography process in order to achieve high resolution contact holes.


2014 ◽  
Author(s):  
Benjamin D. Nation ◽  
Andrew Peters ◽  
Richard A. Lawson ◽  
Peter J. Ludovice ◽  
Clifford L. Henderson

2002 ◽  
Vol 724 ◽  
Author(s):  
Elizabeth R. Wright ◽  
R. Andrew McMillan ◽  
Alan Cooper ◽  
Robert P. Apkarian ◽  
Vincent P. Conticello

AbstractTriblock copolymers have traditionally been synthesized with conventional organic components. However, triblock copolymers could be synthesized by the incorporation of two incompatible protein-based polymers. The polypeptides would differ in their hydrophobicity and confer unique physiochemical properties to the resultant materials. One protein-based polymer, based on a sequence of native elastin, that has been utilized in the synthesis of biomaterials is poly (Valine-Proline-Glycine-ValineGlycine) or poly(VPGVG) [1]. This polypeptide has been shown to have an inverse temperature transition that can be adjusted by non-conservative amino acid substitutions in the fourth position [2]. By combining polypeptide blocks with different inverse temperature transition values due to hydrophobicity differences, we expect to produce amphiphilic polypeptides capable of self-assembly into hydrogels. Our research examines the design, synthesis and characterization of elastin-mimetic block copolymers as functional biomaterials. The methods that are used for the characterization include variable temperature 1D and 2D High-Resolution-NMR, cryo-High Resolutions Scanning Electron Microscopy and Differential Scanning Calorimetry.


Author(s):  
Weihua Li ◽  
Xueying Gu

Since tremendous progress has been made, directed self-assembly (DSA) of block copolymers has been regarded as one of the most promising bottom-up lithography techniques. In particular, DSA has been successfully...


2020 ◽  
Vol 2 (11) ◽  
pp. 4893-4901
Author(s):  
Karthika Madathil ◽  
Kayla A. Lantz ◽  
Morgan Stefik ◽  
Gila E. Stein

2021 ◽  
Author(s):  
Wei Wen ◽  
Aihua Chen

Self-assembly of amphiphilic single chain Janus nanoparticles (SCJNPs) is a novel and promising approach to fabricate assemblies with diversified morphologies. However, the experimental research of the self-assembly behavior of SCJNPs...


Soft Matter ◽  
2021 ◽  
Author(s):  
Alexander Kantardjiev

We carried out a series of coarse-grained molecular dynamics liposome-copolymer simulations with varying extent of copolymer concentration in an attempt to understand the effect of copolymer structure and concentration on vesicle self-assembly and stability.


Molecules ◽  
2021 ◽  
Vol 26 (5) ◽  
pp. 1412
Author(s):  
Eunkyung Ji ◽  
Cian Cummins ◽  
Guillaume Fleury

The ability of bottlebrush block copolymers (BBCPs) to self-assemble into ordered large periodic structures could greatly expand the scope of photonic and membrane technologies. In this paper, we describe a two-step synthesis of poly(l-lactide)-b-polystyrene (PLLA-b-PS) BBCPs and their rapid thin-film self-assembly. PLLA chains were grown from exo-5-norbornene-2-methanol via ring-opening polymerization (ROP) of l-lactide to produce norbornene-terminated PLLA. Norbonene-terminated PS was prepared using anionic polymerization followed by a termination reaction with exo-5-norbornene-2-carbonyl chloride. PLLA-b-PS BBCPs were prepared from these two norbornenyl macromonomers by a one-pot sequential ring opening metathesis polymerization (ROMP). PLLA-b-PS BBCPs thin-films exhibited cylindrical and lamellar morphologies depending on the relative block volume fractions, with domain sizes of 46–58 nm and periodicities of 70–102 nm. Additionally, nanoporous templates were produced by the selective etching of PLLA blocks from ordered structures. The findings described in this work provide further insight into the controlled synthesis of BBCPs leading to various possible morphologies for applications requiring large periodicities. Moreover, the rapid thin film patterning strategy demonstrated (>5 min) highlights the advantages of using PLLA-b-PS BBCP materials beyond their linear BCP analogues in terms of both dimensions achievable and reduced processing time.


2010 ◽  
Vol 28 (2) ◽  
pp. 84-92 ◽  
Author(s):  
Jieshu Qian ◽  
Meng Zhang ◽  
Ian Manners ◽  
Mitchell A. Winnik

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