Simulation of Scanning Electron Microscope Image for Trench Structures

Masatoshi Kotera; Satoru Yamaguchi; Sachio Umegaki; Hiroshi Suga

doi:10.1143/jjap.32.6281

Simulation of Scanning Electron Microscope Image for Trench Structures

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.6281 ◽

1993 ◽

Vol 32 (Part 1, No. 12B) ◽

pp. 6281-6286 ◽

Cited By ~ 3

Author(s):

Masatoshi Kotera ◽

Satoru Yamaguchi ◽

Sachio Umegaki ◽

Hiroshi Suga

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Electron Microscope Image ◽

Scanning Electron

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Monte Carlo Simulation of Dopant Contrast in Scanning Electron Microscope Image

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2009.c222 ◽

2009 ◽

Vol 9 (2) ◽

pp. 1644-1646

Author(s):

S. F. Mao ◽

Z. J. Ding

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Electron Microscope Image ◽

Scanning Electron

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Scanning electron microscope image enhancement using spread spectrum through dither signal imposition

Journal of Electron Microscopy ◽

10.1093/jmicro/dfr074 ◽

2011 ◽

Vol 60 (6) ◽

pp. 367-373

Author(s):

K. O. Jung ◽

W. Joo ◽

D. H. Kim

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Image Enhancement ◽

Spread Spectrum ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Electron Microscope Image ◽

Scanning Electron

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Model of the production of a scanning electron microscope image in reflected electrons

Measurement Techniques ◽

10.1007/bf00979627 ◽

1995 ◽

Vol 38 (2) ◽

pp. 160-167

Author(s):

A. I. Kozlitin ◽

A. V. Nikitin

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Electron Microscope Image ◽

Scanning Electron

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Improvement to the scanning electron microscope image colourization by adaptive tuning

Journal of Microscopy ◽

10.1111/j.1365-2818.2009.03167.x ◽

2009 ◽

Vol 234 (3) ◽

pp. 243-250 ◽

Cited By ~ 3

Author(s):

K.S. SIM ◽

H.Y. TING ◽

M.A. LAI ◽

C.P. TSO

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Adaptive Tuning ◽

Electron Microscope Image ◽

Scanning Electron

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Alignment and averaging of scanning electron microscope image contours for optical proximity correction modeling purposes

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.3514704 ◽

2010 ◽

Vol 9 (4) ◽

pp. 041302 ◽

Cited By ~ 11

Author(s):

Peter De Bisschop

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Optical Proximity Correction ◽

Electron Microscope Image ◽

Scanning Electron

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Monte Carlo Simulation of Scanning Electron Microscope Image of Sidewall Shape for Linewidth Measurement

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2009.c225 ◽

2009 ◽

Vol 9 (2) ◽

pp. 1655-1658

Author(s):

S. M. Xiao ◽

Z. M. Zhang ◽

H. M. Li ◽

Z. J. Ding

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Linewidth Measurement ◽

Electron Microscope Image ◽

Scanning Electron

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Neural Network Recognition of Scanning Electron Microscope Image for Plasma Diagnosis

Lecture Notes in Computer Science - PRICAI 2006: Trends in Artificial Intelligence ◽

10.1007/11801603_38 ◽

2006 ◽

pp. 350-357

Author(s):

Byungwhan Kim ◽

Wooram Ko ◽

Seung Soo Han

Keyword(s):

Neural Network ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Plasma Diagnosis ◽

Electron Microscope Image ◽

Scanning Electron

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Improvement to the scanning electron microscope image adaptive Canny optimization colorization by pseudo-mapping

Scanning ◽

10.1002/sca.21152 ◽

2014 ◽

Vol 36 (5) ◽

pp. 530-539 ◽

Cited By ~ 2

Author(s):

T. Y. Lo ◽

K. S. Sim ◽

C. P. Tso ◽

M. E. Nia

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Electron Microscope Image ◽

Scanning Electron

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A method for estimating microporosity of fine-grained sediments and sedimentary rocks via scanning electron microscope image analysis

Sedimentology ◽

10.1111/sed.12271 ◽

2016 ◽

Vol 63 (6) ◽

pp. 1507-1521 ◽

Cited By ~ 10

Author(s):

Michael Nole ◽

Hugh Daigle ◽

Kitty L. Milliken ◽

Maša Prodanović

Keyword(s):

Image Analysis ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Sedimentary Rocks ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Fine Grained ◽

Electron Microscope Image ◽

Scanning Electron

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Processing of scanning electron microscope image on wild Bc2 analytical plotter

Close-Range Photogrammetry Meets Machine Vision ◽

10.1117/12.2294319 ◽

1990 ◽

Author(s):

Wenhao Feng ◽

Lixin Sun

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Scanning Electron Microscope Image ◽

Microscope Image ◽

Electron Microscope Image ◽

Scanning Electron

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