Optical characterization of three-dimensional structures within a DRAM capacitor
2012 ◽
Vol 407
(20)
◽
pp. 4075-4077
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1992 ◽
Vol 32
(18)
◽
pp. 1358-1365
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Keyword(s):
1992 ◽
Vol 50
(2)
◽
pp. 1146-1147
1987 ◽
Vol 45
◽
pp. 30-33
1996 ◽
Vol 54
◽
pp. 636-637