Thickness control of a thin film after drying through thermal and evaporative management in drying process of a polymer solution coated on a flat substrate: application of the dynamical model of the drying process

Mapping Intimacies ◽

10.1117/12.886827 ◽

2011 ◽

Cited By ~ 1

Author(s):

Hiroyuki Kagami ◽

Hiroshi Kubota

Keyword(s):

Thin Film ◽

Polymer Solution ◽

Dynamical Model ◽

Drying Process ◽

Thickness Control ◽

Flat Substrate

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A modified dynamical model of drying process of a polymer solution having plural solvents coated on a flat substrate for a flat and homogeneous polymer film fabrication

10.1117/12.854021 ◽

2010 ◽

Author(s):

Hiroyuki Kagami

Keyword(s):

Polymer Solution ◽

Polymer Film ◽

Dynamical Model ◽

Drying Process ◽

Flat Substrate ◽

Film Fabrication

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Nonlinear dynamics that appears in the dynamical model of drying process of a polymer solution coated on a flat substrate

10.1117/12.695803 ◽

2006 ◽

Author(s):

Hiroyuki Kagami

Keyword(s):

Nonlinear Dynamics ◽

Polymer Solution ◽

Dynamical Model ◽

Drying Process ◽

Flat Substrate

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A dynamical model of drying process of a polymer solution having plural solvents and plural solutes (polymers) coated on a flat substrate for a flat and homogeneous polymer film fabrication

physica status solidi (c) ◽

10.1002/pssc.201000523 ◽

2010 ◽

Vol 8 (2) ◽

pp. 586-588 ◽

Cited By ~ 2

Author(s):

Hiroyuki Kagami ◽

Hiroshi Kubota

Keyword(s):

Polymer Solution ◽

Polymer Film ◽

Dynamical Model ◽

Drying Process ◽

Flat Substrate ◽

Film Fabrication

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Applying the dynamical model of drying process of a polymer solution coated on a flat substrate to effects of bumpy substrate

10.1117/12.860485 ◽

2010 ◽

Author(s):

Hiroyuki Kagami ◽

Hiroshi Kubota

Keyword(s):

Polymer Solution ◽

Dynamical Model ◽

Drying Process ◽

Flat Substrate

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The influence of spatio-temporal variation of temperature distribution in a polymer solution on a flat substrate on formation of polymer film's thickness distribution during the drying process, based on results of simulation of the modified model

10.1117/12.557711 ◽

2004 ◽

Author(s):

Hiroyuki Kagami

Keyword(s):

Temperature Distribution ◽

Temporal Variation ◽

Polymer Solution ◽

Thickness Distribution ◽

Drying Process ◽

Modified Model ◽

Flat Substrate ◽

Spatio Temporal

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Characteristic three-dimensional structure of resist's distribution after drying a resist solution coated on a flat substrate: analysis using the extended dynamical model of the drying process

10.1117/12.814141 ◽

2009 ◽

Author(s):

Hiroyuki Kagami

Keyword(s):

Three Dimensional ◽

Dynamical Model ◽

Dimensional Structure ◽

Drying Process ◽

Three Dimensional Structure ◽

Flat Substrate

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Impact of the Marangoni Effect on Thin Film Thickness Profile after Drying of Polymer Solution Coated on a Flat Substrate

Proceedings of the 12th Asia Pacific Physics Conference (APPC12) ◽

10.7566/jpscp.1.015087 ◽

2014 ◽

Author(s):

Hiroyuki Kagami

Keyword(s):

Thin Film ◽

Film Thickness ◽

Polymer Solution ◽

Marangoni Effect ◽

Thin Film Thickness ◽

Thickness Profile ◽

Flat Substrate

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Control of the Marangoni Effect in the Drying Process of a Polymer Solution Coated on a Flat Substrate through Temperature, Evaporation and Solute Concentration Management

Athens Journal of Τechnology & Engineering ◽

10.30958/ajte.2-1-4 ◽

2015 ◽

Vol 2 (1) ◽

pp. 45-54

Author(s):

Hiroyuki Kagami

Keyword(s):

Polymer Solution ◽

Marangoni Effect ◽

Solute Concentration ◽

Drying Process ◽

Flat Substrate

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A modified dynamical model of drying process of polymer blend solution coated on a flat substrate

10.1117/12.793082 ◽

2008 ◽

Author(s):

Hiroyuki Kagami

Keyword(s):

Polymer Blend ◽

Dynamical Model ◽

Drying Process ◽

Flat Substrate

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Impact of the Marangoni effect on the polymer thin film thickness profile after drying polymer solution coated on a flat substrate

10.1117/12.2023864 ◽

2013 ◽

Author(s):

Hiroyuki Kagami

Keyword(s):

Thin Film ◽

Film Thickness ◽

Polymer Solution ◽

Marangoni Effect ◽

Thin Film Thickness ◽

Polymer Thin Film ◽

Thickness Profile ◽

Flat Substrate

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