Transfer and characterization of silicon nanomembrane-based photonic devices on flexible polyimide substrate

Stamp printing of silicon-nanomembrane-based photonic devices onto flexible substrates with a suspended configuration

Optics Letters ◽

10.1364/ol.37.001020 ◽

2012 ◽

Vol 37 (6) ◽

pp. 1020 ◽

Cited By ~ 33

Author(s):

Xiaochuan Xu ◽

Harish Subbaraman ◽

Amir Hosseini ◽

Che-Yun Lin ◽

David Kwong ◽

...

Keyword(s):

Photonic Devices ◽

Flexible Substrates ◽

Silicon Nanomembrane

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Silicon photonic devices for mid-infrared applications

Nanophotonics ◽

10.1515/nanoph-2013-0027 ◽

2014 ◽

Vol 3 (4-5) ◽

pp. 329-341 ◽

Cited By ~ 19

Author(s):

Raji Shankar ◽

Marko Lončar

Keyword(s):

Gas Sensing ◽

Wavelength Region ◽

Photonic Devices ◽

Ring Resonators ◽

Space Communications ◽

Mid Infrared ◽

Silicon Photonic ◽

Processing Techniques ◽

Silicon Based

AbstractThe mid-infrared (IR) wavelength region (2–20 µm) is of great interest for a number of applications, including trace gas sensing, thermal imaging, and free-space communications. Recently, there has been significant progress in developing a mid-IR photonics platform in Si, which is highly transparent in the mid-IR, due to the ease of fabrication and CMOS compatibility provided by the Si platform. Here, we discuss our group’s recent contributions to the field of silicon-based mid-IR photonics, including photonic crystal cavities in a Si membrane platform and grating-coupled high-quality factor ring resonators in a silicon-on-sapphire (SOS) platform. Since experimental characterization of microphotonic devices is especially challenging at the mid-IR, we also review our mid-IR characterization techniques in some detail. Additionally, pre- and post-processing techniques for improving device performance, such as resist reflow, Piranha clean/HF dip cycling, and annealing are discussed.

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Fabrication and characterization of Ge/graphene heterojunction on a flexible polyimide substrate

Materials Letters ◽

10.1016/j.matlet.2021.131155 ◽

2021 ◽

pp. 131155

Author(s):

Rong Wang ◽

Lianbi Li ◽

Lei Li ◽

Changjun Zhu ◽

Zebin Li ◽

...

Keyword(s):

Polyimide Substrate ◽

Fabrication And Characterization

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Large area transferred silicon nanomembrane photonic devices on unconventional substrates

10.1117/12.2005565 ◽

2013 ◽

Cited By ~ 1

Author(s):

Xiaochuan Xu ◽

Harish Subbaraman ◽

Amir Hosseini ◽

David Kwong ◽

Ray T. Chen

Keyword(s):

Photonic Devices ◽

Large Area ◽

Silicon Nanomembrane

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Large Area Silicon Nanomembrane Photonic Devices on Unconventional Substrates

IEEE Photonics Technology Letters ◽

10.1109/lpt.2013.2272678 ◽

2013 ◽

Vol 25 (16) ◽

pp. 1601-1604 ◽

Cited By ~ 8

Author(s):

Xiaochuan Xu ◽

Harish Subbaraman ◽

David Kwong ◽

Amir Hosseini ◽

Yang Zhang ◽

...

Keyword(s):

Photonic Devices ◽

Large Area ◽

Silicon Nanomembrane

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Subwavelength grating couplers for efficient light coupling into silicon nanomembrane based photonic devices

10.1117/12.2004707 ◽

2013 ◽

Author(s):

Harish Subbaraman ◽

Xiaochuan Xu ◽

John Covey ◽

Ray T. Chen

Keyword(s):

Photonic Devices ◽

Grating Couplers ◽

Subwavelength Grating ◽

Silicon Nanomembrane ◽

Light Coupling

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Complete response characterization of ultrafast linear photonic devices

Optics Letters ◽

10.1364/ol.34.003418 ◽

2009 ◽

Vol 34 (21) ◽

pp. 3418 ◽

Cited By ~ 15

Author(s):

Tobias Kampfrath ◽

Daryl M. Beggs ◽

Thomas F. Krauss ◽

L. (Kobus) Kuipers

Keyword(s):

Complete Response ◽

Photonic Devices

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Simple method for manufacturing and optical characterization of tapered optical fibres

Opto-Electronics Review ◽

10.1515/oere-2016-0024 ◽

2016 ◽

Vol 24 (4) ◽

Cited By ~ 2

Author(s):

A. Zakrzewski ◽

A. Pięta ◽

S. Patela

Keyword(s):

Focal Length ◽

Fdtd Method ◽

Single Mode ◽

Photonic Devices ◽

Optical Fibres ◽

Simple Method ◽

Spot Diameter ◽

Small Spot ◽

Edge Method

AbstractPhotonic devices often use light delivered by a single-mode telecommunication fibre. However, as the diameter of the core of the optical fibre is of 10 microns, and the transverse dimensions of the photonic waveguides are usually micrometer or less, there is an issue of incompatibility. The problem may be solved by application of tapered optical fibres. For efficient light coupling, the taper should be prepared so as to create a beam of long focal length and small spot diameter in the focus. The article describes the design, fabrication and characterization of tapered optical fibres prepared with a fibre-optic fusion splicer. We modelled the tapers with FDTD method, for estimation of the influence of the tapered length and angle on the spot diameter and the focal length of an outgoing beam. We fabricated tapers from a standard single mode fibre by the Ericsson 995 PMfi- bre-optic fusion splicer. We planned the splicing technology so as to get the needed features of the beam. We planned a multistep fusion process, with optimized fusion current and fusion time. The experimental measurements of best tapered optical fibres were carried out by the knife-edge method.

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