scholarly journals High aspect ratio taper-free micro and nano-channel fabrication in glass with ultrafast nondiffracting Bessel beams

2011 ◽  
Author(s):  
F. Courvoisier ◽  
M. K. Bhuyan ◽  
M. Jacquot ◽  
P. A. Lacourt ◽  
R. Salut ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Bessel Beams ◽  
Nano Channel

Millijoule femtosecond micro-Bessel beams for ultra-high aspect ratio machining

2015 ◽  
Vol 54 (24) ◽  
pp. 7358 ◽  
Author(s):  
Sambit Mitra ◽  
Margaux Chanal ◽  
Raphaël Clady ◽  
Alexandros Mouskeftaras ◽  
David Grojo
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Bessel Beams

scholarly journals Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias

2017 ◽  
Vol 7 (1) ◽  
Author(s):  
Fei He ◽  
Junjie Yu ◽  
Yuanxin Tan ◽  
Wei Chu ◽  
Changhe Zhou ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Bessel Beams ◽  
Through Silicon Vias ◽  
Silicon Vias

scholarly journals Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams

2017 ◽  
Vol 42 (21) ◽  
pp. 4307 ◽  
Author(s):  
R. Meyer ◽  
M. Jacquot ◽  
R. Giust ◽  
J. Safioui ◽  
L. Rapp ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Laser Processing ◽  
Ultrafast Laser ◽  
Single Shot ◽  
Bessel Beams

scholarly journals Reconstructing of Embedded High-Aspect-Ratio Nano-Voids Generated by Ultrafast Laser Bessel Beams

Micromachines ◽  
2020 ◽  
Vol 11 (7) ◽  
pp. 671 ◽  
Author(s):  
Tianqu Chen ◽  
Guodong Zhang ◽  
Yishan Wang ◽  
Xuelong Li ◽  
Razvan Stoian ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Laser Energy ◽  
Focal Region ◽  
Bessel Beams ◽  
Time Saving ◽  
Strong Light ◽  
Nanoscale Structures ◽  
Close Relationship

Ultrafast non-diffractive Bessel laser beams provide strong light confinement and show robust advantages for fabricating high-aspect-ratio nanoscale structures inside transparent materials. They take the form of nanoscale voids with typical diameters well below the wavelength and aspect ratio of more than 1000. Delivering 3D morphologies of such nanoscale voids is an important issue to evaluate the result for fabrication. However, the characterization of such laser-induced structures is a difficult task. Here, an accurate and time-saving tomography-like methodology is proposed and adopted for reconstructing the morphology of high-aspect-ratio nano-holes. The technique allows an accurate assertion of laser parameters and position on nano-structured features. The reconstructed configuration reveals that nanoholes morphologies have a close relationship with energy distribution in the focal region. It suggests that the configuration of micro-explosion can be controlled by laser energy deposition in the process of laser-matter interaction down to the nanoscale.

scholarly journals High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams

2010 ◽  
Vol 18 (2) ◽  
pp. 566 ◽  
Author(s):  
M. K. Bhuyan ◽  
F. Courvoisier ◽  
P.-A. Lacourt ◽  
M. Jacquot ◽  
L. Furfaro ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Bessel Beams

Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams

2014 ◽  
Vol 104 (2) ◽  
pp. 021107 ◽  
Author(s):  
M. K. Bhuyan ◽  
P. K. Velpula ◽  
J. P. Colombier ◽  
T. Olivier ◽  
N. Faure ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Fused Silica ◽  
Ultrafast Laser ◽  
Single Shot ◽  
Bessel Beams

Fabrication of High-Aspect-Ratio Structural Change Microregions in Silicon Carbide by Femtosecond Bessel Beams

2015 ◽  
Vol 1102 ◽  
pp. 143-147
Author(s):  
Liang Liang Zhao ◽  
Feng Wang ◽  
Jun Xie ◽  
Wei Wei Zhao
Keyword(s):  
Silicon Carbide ◽  
Structural Change ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Propagation Distance ◽  
Bessel Beams ◽  
Convex Lens ◽  
Potential Applications ◽  
Optimized Conditions ◽  
Induced Structure

This letter presents the morphology of femtosecond Bessel beams induced high-aspect-ratio structural change regions in bulk silicon carbide. An axion is engaged in transforming Gaussians beams to Bessel beams, which are then focused on the surface or below the surface of the sample by combination of a plano-convex lens and a microscope objective. The sample is scanned by the focused femtosecond Bessel beams at the preset patterns. Through this method, the high-aspect-ratio uniform laser induced structure change regions have been produced and the highest respect ratio can reach 206 with the depth of 330 μm, the width of 1.6 μm in optimized conditions of appropriate focusing position and pulse energy. This result is attributed to uniform energy distribution in the long propagation distance of Bessel beams with nondiffracting. This technique will have great potential applications to make high-aspect-ratio microgrooves in wide-gap and transparent materials.

scholarly journals High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond Bessel beams

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
L. Rapp ◽  
R. Meyer ◽  
R. Giust ◽  
L. Furfaro ◽  
M. Jacquot ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Bessel Beams

scholarly journals Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass

2010 ◽  
Author(s):  
M. K. Bhuyan ◽  
F. Courvoisier ◽  
P.-A. Lacourt ◽  
M. Jacquot ◽  
L. Furfaro ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Bessel Beams
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