Optical properties of atomic layer deposited materials and their application in silicon waveguides
Keyword(s):
W:Al2O3 Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition
2016 ◽
Vol 120
(27)
◽
pp. 14681-14689
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2013 ◽
Vol 23
(8)
◽
pp. 469-475
◽
Keyword(s):
2010 ◽
Vol 114
(48)
◽
pp. 20713-20718
◽
1990 ◽
Vol 101
(1-4)
◽
pp. 81-85
◽
Keyword(s):