High‐power fast‐atom beam source and its application to dry etching

1992 ◽  
Vol 10 (4) ◽  
pp. 1352-1357 ◽  
Author(s):  
Fusao Shimokawa
Keyword(s):  
High Power ◽  
Dry Etching ◽  
Atom Beam ◽  
Beam Source ◽  
Fast Atom Beam

New high‐power fast atom beam source

1994 ◽  
Vol 12 (5) ◽  
pp. 2739-2744 ◽  
Author(s):  
Fusao Shimokawa ◽  
Hiroki Kuwano
Keyword(s):  
High Power ◽  
Atom Beam ◽  
Beam Source ◽  
Fast Atom Beam

Characterization of a saddle field fast atom beam source

Vacuum ◽  
1988 ◽  
Vol 38 (2) ◽  
pp. 111-115 ◽  
Author(s):  
SO Saied ◽  
JL Sullivan ◽  
RK Fitch
Keyword(s):  
Atom Beam ◽  
Beam Source ◽  
Fast Atom Beam

New Long Life Fast Atom Beam Source for Surface Activated Bonding

2021 ◽  
Author(s):  
R. Morisaki ◽  
J. Sakurai ◽  
C. Oka ◽  
T. Yamazaki ◽  
T. Akao ◽  
...  
Keyword(s):  
Atom Beam ◽  
Beam Source ◽  
Fast Atom Beam ◽  
Long Life

Particle-in-cell Monte Carlo collision simulation and experimental measurement of Ar plasma in a fast atom beam source for surface-activated bonding

2021 ◽  
Vol 60 (SC) ◽  
pp. SCCB01
Author(s):  
Ryo Morisaki ◽  
Takahiro Yamazaki ◽  
Chiemi Oka ◽  
Junpei Sakurai ◽  
Takami Hirai ◽  
...  
Keyword(s):  
Monte Carlo ◽  
Experimental Measurement ◽  
Atom Beam ◽  
Beam Source ◽  
Particle In Cell ◽  
Fast Atom Beam ◽  
Ar Plasma
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