Advancement in 17-micron pixel pitch uncooled focal plane arrays

2009 ◽  
Author(s):  
Chuan Li ◽  
George Skidmore ◽  
Christopher Howard ◽  
Elwood Clarke ◽  
C. J. Han
Keyword(s):  
Focal Plane ◽  
Focal Plane Arrays ◽  
Pixel Pitch

Uncooled microbolometer detector: recent developments at ULIS

2006 ◽  
Vol 14 (1) ◽  
Author(s):  
J. Tissot ◽  
C. Trouilleau ◽  
B. Fieque ◽  
A. Crastes ◽  
O. Legras
Keyword(s):  
Process Control ◽  
Focal Plane ◽  
Infrared Detector ◽  
Wide Band ◽  
Industrial Applications ◽  
Focal Plane Arrays ◽  
Ir Detector ◽  
Infrared Focal Plane Arrays ◽  
Wide Range ◽  
Pixel Pitch

AbstractUncooled infrared focal plane arrays are being developed for a wide range of thermal imaging applications. Fire-fighting, predictive maintenance, process control and thermography are a few of the industrial applications which could take benefit from uncooled infrared detector. Therefore, to answer these markets, a 35-μm pixel-pitch uncooled IR detector technology has been developed enabling high performance 160×120 and 384×288 arrays production. Besides a wide-band version from uncooled 320×240/45 μm array has been also developed in order to address process control and more precisely industrial furnaces control. The ULIS amorphous silicon technology is well adapted to manufacture low cost detector in mass production. After some brief microbolometer technological background, we present the characterization of 35 μm pixel-pitch detector as well as the wide-band 320×240 infrared focal plane arrays with a pixel pitch of 45 μm.

Semiconductor YBACUO Uncooled Focal Plane Arrays

2006 ◽  
Author(s):  
Donald Butler ◽  
Zeynep Celik-Bulter
Keyword(s):  
Focal Plane ◽  
Focal Plane Arrays

Further Developments in Improved Sensitivity, Low-cost Uncooled IR Detector Focal Plane Arrays

2010 ◽  
Author(s):  
Wendy L. Sarney ◽  
John W. Little ◽  
Kimberley A. Olver ◽  
Frank E. Livingston ◽  
Krisztian Niesz ◽  
...  
Keyword(s):  
Focal Plane ◽  
Low Cost ◽  
Focal Plane Arrays ◽  
Ir Detector

Dependence of the Deformation of 128×128 InSb Focal-plane Arrays on the Silicon Readout Integrated Circuit Thickness

2015 ◽  
Vol 9 (1) ◽  
pp. 170-174 ◽  
Author(s):  
Xiaoling Zhang ◽  
Qingduan Meng ◽  
Liwen Zhang
Keyword(s):  
Thermal Shock ◽  
Indium Antimonide ◽  
Integrated Circuit ◽  
Focal Plane ◽  
Three Dimensional ◽  
Fracture Probability ◽  
Focal Plane Arrays ◽  
Thermal Shock Test ◽  
Readout Integrated Circuit ◽  
Three Dimensional Modeling

The square checkerboard buckling deformation appearing in indium antimonide infrared focal-plane arrays (InSb IRFPAs) subjected to the thermal shock tests, results in the fracturing of the InSb chip, which restricts its final yield. In light of the proposed three-dimensional modeling, we proposed the method of thinning a silicon readout integrated circuit (ROIC) to level the uneven top surface of InSb IRFPAs. Simulation results show that when the silicon ROIC is thinned from 300 μm to 20 μm, the maximal displacement in the InSb IRFPAs linearly decreases from 7.115 μm to 0.670 μm in the upward direction, and also decreases linearly from 14.013 μm to 1.612 μm in the downward direction. Once the thickness of the silicon ROIC is less than 50 μm, the square checkerboard buckling deformation distribution presenting in the thicker InSb IRFPAs disappears, and the top surface of the InSb IRFPAs becomes flat. All these findings imply that the thickness of the silicon ROIC determines the degree of deformation in the InSb IRFPAs under a thermal shock test, that the method of thinning a silicon ROIC is suitable for decreasing the fracture probability of the InSb chip, and that this approach improves the reliability of InSb IRFPAs.

scholarly journals Fabrication of 15-$\mu$ m Pitch $640\times512$ InAs/GaSb Type-II Superlattice Focal Plane Arrays

2019 ◽  
Vol 55 (4) ◽  
pp. 1-5 ◽  
Author(s):  
Fikri Oguz ◽  
Yetkin Arslan ◽  
Erkin Ulker ◽  
Alpan Bek ◽  
Ekmel Ozbay
Keyword(s):  
Focal Plane ◽  
Focal Plane Arrays ◽  
Type Ii ◽  
Type Ii Superlattice
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