Fast mask CD uniformity measurement using zero order diffraction from memory array pattern
1977 ◽
2006 ◽
Vol 326-328
◽
pp. 27-30
Keyword(s):
Keyword(s):
2004 ◽
Vol 240
(4-6)
◽
pp. 261-267
◽
2009 ◽
Vol 56
(21)
◽
pp. 2377-2383
◽