High aspect ratio grating fabrication in SU-8 resist by UV-Curing nanoimprint

2008 ◽  
Author(s):  
Xudi Wang ◽  
Liangjin Ge ◽  
Jingjing Lu ◽  
Shaojun Fu
2008 ◽  
Vol 497 (1) ◽  
pp. 228/[560]-235/[567] ◽  
Author(s):  
I. Yu. Denisyuk ◽  
M. I. Fokina ◽  
N. D. Vorzobova ◽  
Yu. E. Burunkova ◽  
V. G. Bulgakova

2004 ◽  
Author(s):  
Yoshihiko Hirai ◽  
Takaaki Konishi ◽  
Tomohiro Kanakugi ◽  
Hiroaki Kawata ◽  
Hisao Kikuta

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