Development of a Two-Step E-Beam Lithography Process For Submicron Surface Acoustic Wave (SAW) Device Fabrication

1979 ◽  
Vol 18 (1) ◽  
pp. 180153
Author(s):  
D. B. MacDonald
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Device Fabrication ◽  
Lithography Process

scholarly journals Enhanced surface acoustic wave cell sorting by 3D microfluidic-chip design

Lab on a Chip ◽  
2017 ◽  
Vol 17 (23) ◽  
pp. 4059-4069 ◽  
Author(s):  
W. L. Ung ◽  
K. Mutafopulos ◽  
P. Spink ◽  
R. W. Rambach ◽  
T. Franke ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Microfluidic Chip ◽  
Cell Sorting ◽  
Device Fabrication ◽  
Wave Excitation ◽  
Planar Surface ◽  
Chip Design ◽  
Cell Sorter ◽  
Enhanced Surface

We demonstrate an acoustic wave driven microfluidic cell sorter that combines advantages of multilayer device fabrication with planar surface acoustic wave excitation.

STUDY OF DEFECTS IN a-Ge AND a-GeHxUSING SURFACE ACOUSTIC WAVE TECHNIQUE

1981 ◽  
Vol 42 (C4) ◽  
pp. C4-365-C4-368
Author(s):  
K. L. Bhatia ◽  
M.v. Haumeder ◽  
S. Hunklinger
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Technique

Powder Transport by Surface Acoustic Wave Actuator using Bragg Reflection

2014 ◽  
Vol 134 (12) ◽  
pp. 1934-1935
Author(s):  
Tsunemasa Saiki ◽  
Yuya Matsui ◽  
Yasuto Arisue ◽  
Yuichi Utsumi ◽  
Akinobu Yamaguchi
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Bragg Reflection
Sign in / Sign up

Export Citation Format

Share Document