Fabrication of multilayer laminar grating with high efficiency for extreme ultraviolet

2007 ◽  
Author(s):  
Li-Chao Zhang ◽  
Hui Lin ◽  
Chun-Shui Jin ◽  
Hong-Jun Zhou ◽  
Tong-Lin Huo
Keyword(s):  
High Efficiency ◽  
Extreme Ultraviolet

A HIGH EFFICIENCY IMAGING EXTREME ULTRAVIOLET SPECTROMETER

1991 ◽  
pp. 380-389
Author(s):  
JEFFREY S. MORGAN ◽  
J. GETHYN TIMOTHY ◽  
DAVID C. SLATER ◽  
MARTIN C.E. HUBER ◽  
GIUSEPPE TONDELLO ◽  
...  
Keyword(s):  
High Efficiency ◽  
Extreme Ultraviolet ◽  
Ultraviolet Spectrometer

scholarly journals Design, fabrication, and characterization of high-efficiency extreme-ultraviolet diffusers

2004 ◽  
Vol 43 (28) ◽  
pp. 5323 ◽  
Author(s):  
Patrick P. Naulleau ◽  
J. Alexander Liddle ◽  
Farhad Salmassi ◽  
Erik H. Anderson ◽  
Eric M. Gullikson
Keyword(s):  
High Efficiency ◽  
Extreme Ultraviolet ◽  
Fabrication And Characterization

scholarly journals High efficiency extreme ultraviolet overview spectrometer: Construction and laboratory testing

2006 ◽  
Vol 77 (10) ◽  
pp. 10F305 ◽  
Author(s):  
W. Biel ◽  
A. Greiche ◽  
R. Burhenn ◽  
E. Jourdain ◽  
D. Lepere
Keyword(s):  
Laboratory Testing ◽  
High Efficiency ◽  
Extreme Ultraviolet

High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region

2008 ◽  
Vol 33 (5) ◽  
pp. 485 ◽  
Author(s):  
Hui Lin ◽  
Lichao Zhang ◽  
Lifeng Li ◽  
Chunshui Jin ◽  
Hongjun Zhou ◽  
...  
Keyword(s):  
High Efficiency ◽  
Extreme Ultraviolet ◽  
Ion Beam ◽  
Wavelength Region ◽  
Blazed Grating ◽  
Ultraviolet Wavelength

Design and fabrication of a high-efficiency extreme-ultraviolet binary phase-only computer-generated hologram

2007 ◽  
Vol 46 (14) ◽  
pp. 2581 ◽  
Author(s):  
Patrick P. Naulleau ◽  
Farhad Salmassi ◽  
Eric M. Gullikson ◽  
J. Alexander Liddle
Keyword(s):  
High Efficiency ◽  
Extreme Ultraviolet ◽  
Binary Phase ◽  
Computer Generated Hologram

A high-efficiency and high-spectral-resolution EUV/soft X-ray monochromator based on off-plane diffraction

2020 ◽  
Vol 27 (1) ◽  
pp. 25-30 ◽  
Author(s):  
Werner Jark
Keyword(s):  
Spectral Resolution ◽  
High Efficiency ◽  
Extreme Ultraviolet ◽  
Incident Beam ◽  
Grazing Incidence ◽  
Incident Radiation ◽  
High Spectral Resolution ◽  
X Ray ◽  
Grating Monochromator ◽  
Plane Diffraction

The most efficient diffraction at a periodic grating structure is expected to take place when the incident radiation can be considered to have been specularly reflected off the inclined part of grooves that are positioned parallel to the trajectory of the incident beam. Very encouraging results for this configuration, in which the diffraction takes place off-plane, have been reported recently for a grating to be used in a spectrometer for space science investigations. This grating provided high efficiency for a relatively large groove density and a large blaze angle. High efficiency was observed even in higher diffraction orders up to the fourth order. Here the performance parameters, especially for the combination of diffraction efficiency and achievable spectral resolution, will be discussed for a grating used in a grazing-incidence plane-grating monochromator for monochromatization of synchrotron radiation in the extreme ultraviolet (EUV) and soft X-ray range with photon energies between 30 eV and 2000 eV. It is found that the instrument can provide competitive spectral resolution in comparison with the use of in-plane diffraction. In the case of comparable spectral resolution, the off-plane diffraction is found to provide superior efficiency.

Combined Microstructure X-Ray Optics; Multilayer Diffraction Gratings

1987 ◽  
Vol 103 ◽  
Author(s):  
Troy W. Barbee
Keyword(s):  
High Efficiency ◽  
Extreme Ultraviolet ◽  
Diffraction Gratings ◽  
Experimental Results ◽  
Optical Elements ◽  
Ray Optics ◽  
X Ray ◽  
Spectral Ranges

ABSTRACTMultilayers are man-made microstructures engineered to vary in depth that are now of sufficient quality to be used as x-ray, soft x-ray and extreme ultraviolet optics. Gratings are in-plane man-made microstructures which have been used as optic elements for most of this century. Joining of these two optical elements to form combined microstructure optics has the potential for greatly enhancing both the resolution and the throughput attainable in these spectral ranges. Experimental results for multilayer gratings are presented and discussed. It will be demonstrated that multilayer diffraction gratings act as x-ray prisms and are high efficiency dispersion elements.

scholarly journals A high efficiency ultrahigh vacuum compatible flat field spectrometer for extreme ultraviolet wavelengths

2005 ◽  
Vol 76 (8) ◽  
pp. 083102 ◽  
Author(s):  
B. Blagojević ◽  
E.-O. Le Bigot ◽  
K. Fahy ◽  
A. Aguilar ◽  
K. Makonyi ◽  
...  
Keyword(s):  
High Efficiency ◽  
Extreme Ultraviolet ◽  
Ultrahigh Vacuum ◽  
Flat Field
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