Miniaturization and evaluation of fiber optic probes for low-coherence interferometry

2008 ◽  
Author(s):  
Robert Schmitt ◽  
Niels König ◽  
Frank Depiereux
Keyword(s):  
Fiber Optic ◽  
Low Coherence ◽  
Low Coherence Interferometry ◽  
Fiber Optic Probes

scholarly journals Digital phase demodulation for low-coherence interferometry-based fiber-optic sensors

2018 ◽  
Vol 411 ◽  
pp. 27-32 ◽  
Author(s):  
Y. Liu ◽  
R. Strum ◽  
D. Stiles ◽  
C. Long ◽  
A. Rakhman ◽  
...  
Keyword(s):  
Fiber Optic ◽  
Fiber Optic Sensors ◽  
Low Coherence ◽  
Digital Phase ◽  
Low Coherence Interferometry ◽  
Phase Demodulation

Fiber-optic temperature sensor using low-coherence interferometry

2008 ◽  
Vol 154 (1) ◽  
pp. 107-111 ◽  
Author(s):  
M. Jedrzejewska-Szczerska ◽  
R. Bogdanowicz ◽  
M. Gnyba ◽  
R. Hypszer ◽  
B. B. Kosmowski
Keyword(s):  
Temperature Sensor ◽  
Fiber Optic ◽  
Low Coherence ◽  
Low Coherence Interferometry ◽  
Fiber Optic Temperature Sensor ◽  
Fiber Optic Temperature

Fiber-optics Low-coherence Integrated Metrology for In-Situ Non-contact Characterization of Wafer Curvature for Wafers Having Non-uniform Substrate and Thin Film Thickness

2005 ◽  
Vol 875 ◽  
Author(s):  
Wojciech J. Walecki ◽  
Alexander Pravdivtsev ◽  
Kevin Lai ◽  
Manuel Santos ◽  
Georgy Mikhaylov ◽  
...  
Keyword(s):  
Thin Film ◽  
Construction Industry ◽  
Fiber Optics ◽  
Fiber Optic ◽  
Flat Panel ◽  
Thin Film Thickness ◽  
Low Coherence ◽  
Low Coherence Interferometry

Abstract. We propose novel stress metrology technique for measurement of local values stress tensor components in the coated wafers. New metrology is based on fiber-optic low coherence interferometry and can be applied to study stress not only in semicondiuctor wafers but in wide variety applications spanning from semiconductor to construction industry where measurements of plates covered by thin film encountered in flat panel displayes, solar cells, modern windows.

Sign in / Sign up

Export Citation Format

Share Document