Rigorous electromagnetic field simulation of two-beam interference exposures for the exploration of double patterning and double exposure scenarios

Mapping Intimacies ◽

10.1117/12.772741 ◽

2008 ◽

Cited By ~ 5

Author(s):

Andreas Erdmann ◽

Peter Evanschitzky ◽

Tim Fühner ◽

Thomas Schnattinger ◽

Cheng-Bai Xu ◽

...

Keyword(s):

Electromagnetic Field ◽

Double Exposure ◽

Field Simulation ◽

Double Patterning

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A connection machine (CM-2) implementation of a three-dimensional parallel finite difference time-domain code for electromagnetic field simulation

International Journal of Numerical Modelling Electronic Networks Devices and Fields ◽

10.1002/jnm.1660080307 ◽

1995 ◽

Vol 8 (3-4) ◽

pp. 221-232 ◽

Cited By ~ 1

Author(s):

David B. Davidson ◽

Richard W. Ziolkowski

Keyword(s):

Electromagnetic Field ◽

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Three Dimensional ◽

Field Simulation ◽

Connection Machine ◽

Difference Time

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Comparison of absorbing boundary conditions of FDTD in high frequency electromagnetic field simulation

2009 9th International Conference on Electronic Measurement & Instruments ◽

10.1109/icemi.2009.5274911 ◽

2009 ◽

Cited By ~ 1

Author(s):

Hui Xu ◽

Hailian Huang ◽

Yuqiu Chen

Keyword(s):

Electromagnetic Field ◽

Boundary Conditions ◽

High Frequency ◽

Absorbing Boundary Conditions ◽

Absorbing Boundary ◽

Field Simulation ◽

High Frequency Electromagnetic Field

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Demagnetizing Factors for Various Geometries Precisely Determined Using 3-D Electromagnetic Field Simulation

IEEE Transactions on Magnetics ◽

10.1109/tmag.2011.2157994 ◽

2011 ◽

Vol 47 (10) ◽

pp. 4100-4103 ◽

Cited By ~ 16

Author(s):

B. K. Pugh ◽

D. P. Kramer ◽

C. H. Chen

Keyword(s):

Electromagnetic Field ◽

Field Simulation

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Double Patterning Analysis Method by Emulation Using a Double-Exposure Technique

Japanese Journal of Applied Physics ◽

10.1143/jjap.49.035201 ◽

2010 ◽

Vol 49 (3) ◽

pp. 035201

Author(s):

Junji Miyazaki ◽

Nobuhito Toyama ◽

Akira Kawai

Keyword(s):

Analysis Method ◽

Double Exposure ◽

Double Patterning ◽

Exposure Technique

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Equivalent RC networks with mutual capacitances for electromagnetic field simulation of electrical machine transients

IEEE Transactions on Magnetics ◽

10.1109/20.123956 ◽

1992 ◽

Vol 28 (2) ◽

pp. 1406-1409 ◽

Cited By ~ 12

Author(s):

A. Demenko

Keyword(s):

Electromagnetic Field ◽

Electrical Machine ◽

Field Simulation ◽

Rc Networks

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Accelerating three-dimensional FDTD calculations on GPU clusters for electromagnetic field simulation

2012 Annual International Conference of the IEEE Engineering in Medicine and Biology Society ◽

10.1109/embc.2012.6347287 ◽

2012 ◽

Cited By ~ 4

Author(s):

T. Nagaoka ◽

S. Watanabe

Keyword(s):

Electromagnetic Field ◽

Three Dimensional ◽

Field Simulation ◽

Gpu Clusters

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Optimization design of eddy current sensor for fuel balls detection based on electromagnetic field simulation

International Journal of Applied Electromagnetics and Mechanics ◽

10.3233/jae-2010-1157 ◽

2010 ◽

Vol 33 (1-2) ◽

pp. 549-557 ◽

Cited By ~ 1

Author(s):

Liang Zhang ◽

Zandong Han ◽

Bingfang Wang

Keyword(s):

Electromagnetic Field ◽

Eddy Current ◽

Optimization Design ◽

Current Sensor ◽

Eddy Current Sensor ◽

Field Simulation

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Data-driven electromagnetic field simulation with a material-model-free finite element solver

10.23919/ieeeconf54431.2021.9598444 ◽

2021 ◽

Author(s):

Armin Galetzka ◽

Dimitrios Loukrezis ◽

Herbert De Gersem

Keyword(s):

Finite Element ◽

Electromagnetic Field ◽

Material Model ◽

Data Driven ◽

Model Free ◽

Field Simulation

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Parameters Determination of the Trolley Busbars by Electromagnetic Field Simulation

2018 IEEE 3rd International Conference on Intelligent Energy and Power Systems (IEPS) ◽

10.1109/ieps.2018.8559576 ◽

2018 ◽

Cited By ~ 7

Author(s):

D. Yarymbash ◽

M. Kotsur ◽

Yu. Bezverkhnia ◽

S. Yarymbash ◽

I. Kotsur

Keyword(s):

Electromagnetic Field ◽

Field Simulation

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PMJ 2007 panel discussion overview: double exposure and double patterning for 32-nm half-pitch design node

10.1117/12.752596 ◽

2007 ◽

Author(s):

Yoshinori Nagaoka ◽

Hidehiro Watanabe

Keyword(s):

Panel Discussion ◽

Double Exposure ◽

Double Patterning

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