Diamond-like carbon films deposited by femtosecond laser pulses

2007 ◽  
Author(s):  
Yanlong Guo ◽  
Xiao Yuan ◽  
Shuyun Wang ◽  
Changyong Lu ◽  
Xiaobing Wang ◽  
...  
1995 ◽  
Vol 397 ◽  
Author(s):  
F. Qian ◽  
R. K. Singh ◽  
S. Dutta ◽  
P.P. Pronko ◽  
W.H. Weber

ABSTRACTWe have deposited unhydrogenated diamond-like carbon (DLC) films with 100 femtosecond laser pulses, at intensities in the 3x1014 - 6.5x1015 W/cm2 range. Film surface topography, optical property, and bonding structure were examined, respectively, with atomic force microscopy (AFM), spectroscopie ellipsometry (SE) and Raman spectrometry. The femtosecond pulse generated plasma was studied through time-of-flight (TOF) experiment. The most probable kinetic energy of carbon ions was estimated to be in the 300 – 2000 eV range, increasing with laser intensity. In addition, a unique ‘suprathermal’ component with kinetic energy ranging from 4 to 40 keV was observed in the TOF spectrum. This high energy peak is believed to originate from fast ions in a solid density plasma created during the absorption of each femtosecond laser pulse.


2003 ◽  
Vol 780 ◽  
Author(s):  
R. Houbertz ◽  
J. Schulz ◽  
L. Fröhlich ◽  
G. Domann ◽  
M. Popall ◽  
...  

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.


Author(s):  
K. H. Leong ◽  
T. Y. Plew ◽  
R. L. Maynard ◽  
A. A. Said ◽  
L. A. Walker

Author(s):  
V. Pouget ◽  
E. Faraud ◽  
K. Shao ◽  
S. Jonathas ◽  
D. Horain ◽  
...  

Abstract This paper presents the use of pulsed laser stimulation with picosecond and femtosecond laser pulses. We first discuss the resolution improvement that can be expected when using ultrashort laser pulses. Two case studies are then presented to illustrate the possibilities of the pulsed laser photoelectric stimulation in picosecond single-photon and femtosecond two-photon modes.


2016 ◽  
Vol 80 (1) ◽  
pp. 85-88 ◽  
Author(s):  
V. P. Dresvyanskiy ◽  
M. A. Moiseeva ◽  
A. V. Kuznetsov ◽  
D. S. Glazunov ◽  
B. Chadraa ◽  
...  

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