Analysis and optimization of thin film photovoltaic materials and device fabrication by real time spectroscopic ellipsometry

Mapping Intimacies ◽

10.1117/12.736362 ◽

2007 ◽

Cited By ~ 3

Author(s):

Jian Li ◽

Jason A. Stoke ◽

Nikolas J. Podraza ◽

Deepak Sainju ◽

Anuja Parikh ◽

...

Keyword(s):

Thin Film ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Device Fabrication ◽

Photovoltaic Materials

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Spectroscopic ellipsometry characterization of thin film photovoltaic materials and devices

2013 IEEE 39th Photovoltaic Specialists Conference (PVSC) ◽

10.1109/pvsc.2013.6744416 ◽

2013 ◽

Author(s):

Michelle N. Sestak ◽

Li Yan ◽

Celine Eypert

Keyword(s):

Thin Film ◽

Spectroscopic Ellipsometry ◽

Photovoltaic Materials

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Applications of real-time and mapping spectroscopic ellipsometry for process development and optimization in hydrogenated silicon thin-film photovoltaics technology

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2014.01.028 ◽

2014 ◽

Vol 129 ◽

pp. 32-56 ◽

Cited By ~ 15

Author(s):

Lila Raj Dahal ◽

Jian Li ◽

Jason A. Stoke ◽

Zhiquan Huang ◽

Ambalanath Shan ◽

...

Keyword(s):

Thin Film ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Process Development ◽

Silicon Thin Film ◽

Hydrogenated Silicon ◽

Thin Film Photovoltaics

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Optical characterization of a four-medium thin film structure by real time spectroscopic ellipsometry: amorphous carbon on tantalum

Applied Optics ◽

10.1364/ao.30.002692 ◽

1991 ◽

Vol 30 (19) ◽

pp. 2692 ◽

Cited By ~ 39

Author(s):

Yue Cong ◽

IIsin An ◽

K. Vedam ◽

Robert W. Collins

Keyword(s):

Thin Film ◽

Real Time ◽

Amorphous Carbon ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Film Structure ◽

Thin Film Structure

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Spectroscopic ellipsometry on the millisecond time scale for real‐time investigations of thin‐film and surface phenomena

Review of Scientific Instruments ◽

10.1063/1.1143280 ◽

1992 ◽

Vol 63 (8) ◽

pp. 3842-3848 ◽

Cited By ~ 57

Author(s):

Ilsin An ◽

Y. M. Li ◽

H. V. Nguyen ◽

R. W. Collins

Keyword(s):

Thin Film ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Time Scale ◽

Surface Phenomena ◽

Millisecond Time Scale

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Evolution of the optical functions of thin-film aluminum: A real-time spectroscopic ellipsometry study

Physical Review B ◽

10.1103/physrevb.47.3947 ◽

1993 ◽

Vol 47 (7) ◽

pp. 3947-3965 ◽

Cited By ~ 67

Author(s):

Hien V. Nguyen ◽

Ilsin An ◽

R. W. Collins

Keyword(s):

Thin Film ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Optical Functions

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Characterization of Wide Bandgap Thin Film Growth Using UV-Extended Real Time Spectroscopic Ellipsometry: Applications to Cubic Boron Nitride

Journal of Wide Bandgap Materials ◽

10.1106/152451102024505 ◽

2002 ◽

Vol 9 (3) ◽

pp. 191-206

Author(s):

J. A. Zapien ◽

R. W. Collins ◽

L. J. Pilione ◽

R. Messier

Keyword(s):

Thin Film ◽

Boron Nitride ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Film Growth ◽

Cubic Boron Nitride ◽

Wide Bandgap ◽

Thin Film Growth

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Spectroscopic Ellipsometry. Real-Time Monitoring and Control of Thin-Film Growth Using Spectroscopic Ellipsometry.

Hyomen Kagaku ◽

10.1380/jsssj.18.695 ◽

1997 ◽

Vol 18 (11) ◽

pp. 695-699

Author(s):

Tadashi SAITOH

Keyword(s):

Thin Film ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Film Growth ◽

Thin Film Growth ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control

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Efficient thin-film stack characterization using parametric sensitivity analysis for spectroscopic ellipsometry in semiconductor device fabrication

Thin Solid Films ◽

10.1016/j.tsf.2015.05.049 ◽

2015 ◽

Vol 589 ◽

pp. 258-263 ◽

Cited By ~ 5

Author(s):

D.V. Likhachev

Keyword(s):

Thin Film ◽

Sensitivity Analysis ◽

Spectroscopic Ellipsometry ◽

Semiconductor Device ◽

Device Fabrication ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis

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Fabrication of high quality polysilicon thin film on glass and its in situ real-time monitoring by spectroscopic ellipsometry

Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC) ◽

10.1109/wcpec.1994.520210 ◽

2002 ◽

Cited By ~ 1

Author(s):

T. Akasaka ◽

Y. Tanaka ◽

I. Shimizu

Keyword(s):

Thin Film ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Real Time Monitoring ◽

High Quality

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Real time spectroscopic ellipsometry for characterization of thin film optical properties and microstructural evolution

Thin Solid Films ◽

10.1016/0040-6090(91)90454-6 ◽

1991 ◽

Vol 206 (1-2) ◽

pp. 374-380 ◽

Cited By ~ 14

Author(s):

R.W. Collins ◽

Ilsin An ◽

H.V. Nguyen ◽

T. Gu

Keyword(s):

Thin Film ◽

Optical Properties ◽

Real Time ◽

Microstructural Evolution ◽

Spectroscopic Ellipsometry

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