Thermal behavior of thin metal films irradiated by ultra-short pulse laser

2007 ◽  
Author(s):  
Qiulong Hao ◽  
Gang Zhao ◽  
Wenzong Qi
Keyword(s):  
Thermal Behavior ◽  
Pulse Laser ◽  
Short Pulse ◽  
Metal Films ◽  
Thin Metal ◽  
Thin Metal Films ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Silicon Thinning using Ultra-Short Pulse Laser Ablation

2004 ◽  
Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Sample Preparation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Special Care ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.

The study of time dependent, broadband X-ray emission from ultra-short pulse laser produced plasmas

1994 ◽  
Author(s):  
Ronnie Shepherd ◽  
Rex Booth ◽  
Dwight Price ◽  
Rosemary Walling ◽  
Richard More ◽  
...  
Keyword(s):  
Pulse Laser ◽  
Short Pulse ◽  
Time Dependent ◽  
X Ray ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Ultra-short pulse laser safety - a challenge to materials science

2005 ◽  
Author(s):  
Andreas Hertwig ◽  
Sven Martin ◽  
Wolfgang Kautek ◽  
Jörg Krüger
Keyword(s):  
Pulse Laser ◽  
Materials Science ◽  
Short Pulse ◽  
Laser Safety ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Damage-Free Freeform Cutting of Flexible Battery Using Ultra-Short Pulse Laser

2021 ◽  
Vol 38 (3) ◽  
pp. 195-202
Author(s):  
SeokYoung Ji ◽  
Jaegu Kim ◽  
Sung Hak Cho ◽  
Hyungjun Lim ◽  
Won Seok Chang
Keyword(s):  
Pulse Laser ◽  
Short Pulse ◽  
Short Pulse Laser ◽  
Flexible Battery ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser
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