Design of cold-cathode ion sources for precise electron-beam processing of the semiconductor structures
Keyword(s):
2018 ◽
Vol 10
(4)
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pp. 04028-1-04028-7
Keyword(s):
1991 ◽
Vol 37
(2)
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pp. 245-248
2019 ◽
Vol 6
(8)
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pp. 085077
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Keyword(s):
1959 ◽
Vol 6
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pp. 26-32
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