scholarly journals Development of super-resolution optical inspection system for semiconductor defects using standing wave illumination shift

2006 ◽  
Author(s):  
S. Usuki ◽  
H. Nishioka ◽  
S. Takahashi ◽  
K. Takamasu
Keyword(s):  
Standing Wave ◽  
Super Resolution ◽  
Inspection System ◽  
Semiconductor Defects ◽  
Optical Inspection ◽  
Optical Inspection System

Algorithms for a Fast Confocal Optical Inspection System

1996 ◽  
pp. 439-474
Author(s):  
A. R. Rao ◽  
N. Ramesh ◽  
F. Y. Wu ◽  
J. R. Mandeville ◽  
P. Kerstens
Keyword(s):  
Inspection System ◽  
Optical Inspection ◽  
Optical Inspection System

Novel Stent Optical Inspection System

2016 ◽  
Author(s):  
Carlos Bermudez ◽  
Ferran Laguarta ◽  
Cristina Cadevall ◽  
Aitor Matilla ◽  
Sergi Ibañez ◽  
...  
Keyword(s):  
Inspection System ◽  
Optical Inspection ◽  
Optical Inspection System
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