Enhancement of conversion efficiency of extreme ultraviolet radiation from a liquid aqueous solution microjet target by use of dual laser pulses

2006 ◽  
Author(s):  
Takeshi Higashiguchi ◽  
Naoto Dojyo ◽  
Masaya Hamada ◽  
Keita Kawasaki ◽  
Wataru Sasaki ◽  
...  
Keyword(s):  
Aqueous Solution ◽  
Ultraviolet Radiation ◽  
Conversion Efficiency ◽  
Extreme Ultraviolet ◽  
Laser Pulses ◽  
Extreme Ultraviolet Radiation ◽  
Dual Laser

Generation of coherent extreme ultraviolet radiation from α–quartz using 50  fs laser pulses at a 1030  nm wavelength and high repetition rates

2018 ◽  
Vol 43 (8) ◽  
pp. 1790 ◽  
Author(s):  
Tran Trung Luu ◽  
Valerio Scagnoli ◽  
Susmita Saha ◽  
Laura J. Heyderman ◽  
Hans Jakob Wörner
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Laser Pulses ◽  
High Repetition ◽  
Fs Laser ◽  
Extreme Ultraviolet Radiation

Conversion efficiency of extreme ultraviolet radiation in laser-produced plasmas

2006 ◽  
Vol 13 (3) ◽  
pp. 033107 ◽  
Author(s):  
M. Murakami ◽  
S. Fujioka ◽  
H. Nishimura ◽  
T. Ando ◽  
N. Ueda ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Conversion Efficiency ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Radiation

Output energy and conversion efficiency of extreme ultraviolet radiation from rare gas cryogenic targets

2004 ◽  
Author(s):  
Takeshi Higashiguchi ◽  
Takahiro Hirata ◽  
Masato Koga ◽  
Chirag Rajyaguru ◽  
Wataru Sasaki ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Conversion Efficiency ◽  
Extreme Ultraviolet ◽  
Output Energy ◽  
Rare Gas ◽  
Extreme Ultraviolet Radiation

Generation of Continuum Extreme-Ultraviolet Radiation by Carrier-Envelope-Phase-Stabilized 5-fs Laser Pulses

2009 ◽  
Vol 26 (11) ◽  
pp. 113201 ◽  
Author(s):  
Teng Hao ◽  
Yun Chen-Xia ◽  
Zhu Jiang-Feng ◽  
Han Hai-Nian ◽  
Zhong Xin ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Laser Pulses ◽  
Carrier Envelope Phase ◽  
Fs Laser ◽  
Extreme Ultraviolet Radiation

Characteristics of Extreme Ultraviolet Radiation Conversion Efficiency of Xenon Plasma

2004 ◽  
Vol 43 (12) ◽  
pp. 8285-8291 ◽  
Author(s):  
Majid Masnavi ◽  
Mitsuo Nakajima ◽  
Akira Sasaki ◽  
Eiki Hotta ◽  
Kazuhiko Horioka
Keyword(s):  
Ultraviolet Radiation ◽  
Conversion Efficiency ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Radiation ◽  
Radiation Conversion

Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

2018 ◽  
Vol 189 (03) ◽  
pp. 323-334 ◽  
Author(s):  
D.B. Abramenko ◽  
P.S. Antsiferov ◽  
D.I. Astakhov ◽  
Aleksandr Yu. Vinokhodov ◽  
Il'ya Yu. Vichev ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Mask Inspection ◽  
Extreme Ultraviolet Radiation
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