Experimental verification of PSM polarimetry: monitoring polarization at 193nm high-NA with phase shift masks
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1967 ◽
Vol 46
(6)
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pp. 1173-1202
Keyword(s):
1973 ◽
Vol 31
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pp. 266-267
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1972 ◽
Vol 30
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pp. 646-647
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1989 ◽
Vol 47
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pp. 536-537
1997 ◽
Vol 440
(1-2)
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pp. 111-123
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1981 ◽
Vol 128
(1)
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pp. 22
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