scholarly journals Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror

Author(s):  
Julia W. Evans ◽  
Katie Morzinski ◽  
Scott Severson ◽  
Lisa Poyneer ◽  
Bruce Macintosh ◽  
...  
Author(s):  
Hyunkyu Park ◽  
David Horsley

A bimorph deformable mirror (DM) for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. Interferometric measurements of the DM surface shape and voltage-to-displacement characteristics are shown. The response of the DM to a step voltage input is measured using a commercial laser Doppler vibrometer (LDV). Experimental measurements of the DM are compared with both finite-element and analytical models. Analysis of the experimental measurements compared to the theoretical model will be used to design and fabricate an optimized DM for vision science.


1993 ◽  
Author(s):  
Linda M. Miller ◽  
Michael L. Agronin ◽  
Randall K. Bartman ◽  
William J. Kaiser ◽  
Thomas W. Kenny ◽  
...  

Author(s):  
Mohammad Azizian Kalkhoran ◽  
Ann Fitzpatrick ◽  
A. Douglas Winter ◽  
Chris S. Kelley ◽  
Edmund Warrick ◽  
...  

Author(s):  
David A. Horsley ◽  
Hyunkyu Park ◽  
Chih-Wei Chuang ◽  
Sophie P. Laut ◽  
John S. Werner

This paper reports the results of interferometric characterization of a bimorph deformable mirror (DM) designed for use in an adaptive optics (AO) system. The natural frequencies of this DM were measured up to 20 kHz using both a custom stroboscopic phase-shifting interferometer as well as a commercial Laser Doppler Vibrometer (LDV). Interferometric measurements of the DM surface profile were analyzed by fitting the surface with mode-shapes predicted using classical plate theory for an elastically-supported disk. The measured natural frequencies were found to be in good agreement with the predictions of the theoretical model.


Author(s):  
Fangrong Hu ◽  
Jun Yao ◽  
Chuankai Qiu ◽  
Dajia Wang

In this paper, a MEMS mirror actuated by an electrostatic repulsive force has been proposed and analyzed. The mirror consists of four U-shape springs, a fixed bottom electrode and a movable top electrode, there are many comb fingers on the edges of both electrodes. When the voltage is applied to the top and bottom electrodes, an asymmetric electric field is generated to the top movable fingers and springs, thus a net electrostatic force is produced to move the top plate out of plane. This designed micro-mirror is different from conventional MDM based on electrostatic-attractive-force, which is restricted by one-third thickness of the sacrificial layer for the pull-in phenomenon. The characteristic of this MDM has been analyzed, the result shows that the resonant frequency of the first mode is 8 kHz, and the stroke reaches 10μm at 200V, a MDM with large strokes can be realized for the application of adaptive optics in optical aberrations correction.


1998 ◽  
Author(s):  
Armando Riccardi ◽  
N. Bindi ◽  
Roberto Ragazzoni ◽  
Simone Esposito ◽  
Paolo Stefanini

Sign in / Sign up

Export Citation Format

Share Document