Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications

1993 ◽  
Author(s):  
Linda M. Miller ◽  
Michael L. Agronin ◽  
Randall K. Bartman ◽  
William J. Kaiser ◽  
Thomas W. Kenny ◽  
...  
Keyword(s):  
Adaptive Optics ◽  
Deformable Mirror ◽  
Fabrication And Characterization

Fabrication and Characterization of MEMS Deformable Mirrors for Adaptive Optics

2006 ◽  
Author(s):  
Hyunkyu Park ◽  
David Horsley
Keyword(s):  
Adaptive Optics ◽  
Laser Doppler Vibrometer ◽  
Surface Shape ◽  
Analytical Models ◽  
Deformable Mirror ◽  
Experimental Measurements ◽  
Vision Science ◽  
Step Voltage ◽  
Fabrication And Characterization

A bimorph deformable mirror (DM) for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. Interferometric measurements of the DM surface shape and voltage-to-displacement characteristics are shown. The response of the DM to a step voltage input is measured using a commercial laser Doppler vibrometer (LDV). Experimental measurements of the DM are compared with both finite-element and analytical models. Analysis of the experimental measurements compared to the theoretical model will be used to design and fabricate an optimized DM for vision science.

scholarly journals Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror

2006 ◽  
Author(s):  
Julia W. Evans ◽  
Katie Morzinski ◽  
Scott Severson ◽  
Lisa Poyneer ◽  
Bruce Macintosh ◽  
...  
Keyword(s):  
Adaptive Optics ◽  
Deformable Mirror

Novel Fabrication and Characterization of Diaphragm Micromirror Using ‘Bulk Lithography’

2012 ◽  
Author(s):  
Prasanna Gandhi ◽  
Shital Kamble ◽  
Kiran Bhole
Keyword(s):  
Adaptive Optics ◽  
Focal Length ◽  
Laser Doppler Vibrometer ◽  
Single Layer ◽  
Layer By Layer ◽  
Micro Fabrication ◽  
Wavefront Correction ◽  
Fabrication And Characterization ◽  
First Time

Adaptive optics is being explored actively for several applications such as wavefront correction in biomedical imaging (retinal surgery), variable focal length lenses, and adaptive zoom micromirrors. Diaphragm micromirrors have several advantages such as continuity in image and ease of fabrication. This paper investigates, for the first time to the best of our knowledge, fabrication of diaphragm micromirror using a recently proposed novel process of ‘Bulk Lithography’. In contrast to classical microstereolithography (MSL) processes of 3D layer-by-layer micro fabrication, bulk lithography fabrication is done by scanning of laser beam over the photopolymer resin of unconstraint depth in a single layer scan. The process has capability to fabricate smoothly varying thickness diaphragms for micromirrors. However, as a first step, this paper demonstrates fabrication of uniform thickness micromirrors coated with aluminum. Micromirrors are fabricated with air trapped beneath them which contributes to enhanced stiffness and low damping. Further fabricated micromirror is characterized using laser doppler vibrometer.

scholarly journals Characterization of double-deformable-mirror adaptive optics for IR beam shaping in hyperspectral imaging

2020 ◽  
Author(s):  
Mohammad Azizian Kalkhoran ◽  
Ann Fitzpatrick ◽  
A. Douglas Winter ◽  
Chris S. Kelley ◽  
Edmund Warrick ◽  
...  
Keyword(s):  
Hyperspectral Imaging ◽  
Adaptive Optics ◽  
Beam Shaping ◽  
Deformable Mirror

scholarly journals Optical Characterization of a Bimorph Deformable Mirror

2005 ◽  
Author(s):  
David A. Horsley ◽  
Hyunkyu Park ◽  
Chih-Wei Chuang ◽  
Sophie P. Laut ◽  
John S. Werner
Keyword(s):  
Adaptive Optics ◽  
Natural Frequencies ◽  
Plate Theory ◽  
Laser Doppler Vibrometer ◽  
Surface Profile ◽  
Mode Shapes ◽  
Deformable Mirror ◽  
Classical Plate Theory ◽  
Elastically Supported

This paper reports the results of interferometric characterization of a bimorph deformable mirror (DM) designed for use in an adaptive optics (AO) system. The natural frequencies of this DM were measured up to 20 kHz using both a custom stroboscopic phase-shifting interferometer as well as a commercial Laser Doppler Vibrometer (LDV). Interferometric measurements of the DM surface profile were analyzed by fitting the surface with mode-shapes predicted using classical plate theory for an elastically-supported disk. The measured natural frequencies were found to be in good agreement with the predictions of the theoretical model.

Fabrication and Characterization of Polyoxometalate based Nano-hybrids: Evaluation of their role in Biological Activity

2019 ◽  
Vol 35 (4) ◽  
pp. 475-484
Author(s):  
SHIVA ARUN ◽  
◽  
PRABHA BHARTIYA ◽  
AMREEN NAZ ◽  
SUDHEER RAI ◽  
...  
Keyword(s):  
Biological Activity ◽  
Fabrication And Characterization

Fabrication and Characterization of Microcantilever for Detection of Vibration Sensation in Tactile Sensing

2019 ◽  
Vol 139 (11) ◽  
pp. 375-380
Author(s):  
Harutoshi Takahashi ◽  
Yuta Namba ◽  
Takashi Abe ◽  
Masayuki Sohgawa
Keyword(s):  
Tactile Sensing ◽  
Fabrication And Characterization
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