High-rate deposition of optical coatings by closed-field magnetron sputtering

2005 ◽  
Author(s):  
D. R. Gibson ◽  
I. Brinkley ◽  
E. M. Waddell ◽  
J. M. Walls
Keyword(s):  
Magnetron Sputtering ◽  
High Rate ◽  
Optical Coatings ◽  
Closed Field

Deposition of multilayer optical coatings using closed-field magnetron sputtering

2006 ◽  
Author(s):  
D. R. Gibson ◽  
I. Brinkley ◽  
G. W. Hall ◽  
E. M. Waddell ◽  
J. M. Walls
Keyword(s):  
Magnetron Sputtering ◽  
Optical Coatings ◽  
Closed Field

High throughput deposition of precision optical coatings using closed field magnetron sputtering

2004 ◽  
Author(s):  
Desmond R. Gibson ◽  
J. M. Walls ◽  
Ian Brinkley ◽  
Joanne Hampshire ◽  
Paul Teer ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Throughput ◽  
Optical Coatings ◽  
Closed Field
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