A reticle quality management strategy in wafer fabs addressing progressive mask defect growth problem at low k1 lithography

2005 ◽  
Author(s):  
Kaustuve Bhattacharyya ◽  
Mark Eickhoff ◽  
Mark Ma ◽  
Sylvia Pas
Keyword(s):  
Quality Management ◽  
Management Strategy ◽  
Defect Growth ◽  
Growth Problem

A reticle quality management strategy in wafer fabs addressing progressive mask defect growth problem at low-k1 lithography

2004 ◽  
Author(s):  
Kaustuve Bhattacharyya ◽  
Kong Son ◽  
Benjamin G. Eynon, Jr. ◽  
Dadi Gudmundsson ◽  
Carmen Jaehnert ◽  
...  
Keyword(s):  
Quality Management ◽  
Management Strategy ◽  
Defect Growth ◽  
Growth Problem
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