Improvement of a silicon-based non-silicon torsion micro-mirror for optical switch
2005 ◽
Vol 44
(7A)
◽
pp. 4749-4751
◽
Keyword(s):
1992 ◽
Vol 10
(8)
◽
pp. 1078-1085
◽
2009 ◽
2009 ◽
Vol 40
(1)
◽
pp. 83-86
◽
Keyword(s):