Spectroscopic ellipsometer with the smallest measurement spot
2008 ◽
Vol 47
(7)
◽
pp. 5477-5481
◽
2021 ◽
Vol 141
(4)
◽
pp. 572-573
2004 ◽
2009 ◽
Vol 80
(8)
◽
pp. 083104
◽
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