scholarly journals Two-dimensional capacitive micromachined ultrasonic transducer (CMUT) arrays for a miniature integrated volumetric ultrasonic imaging system

Author(s):  
Xuefeng Zhuang ◽  
Ira O. Wygant ◽  
David T. Yeh ◽  
Amin Nikoozadeh ◽  
Omer Oralkan ◽  
...  
Sensors ◽  
2019 ◽  
Vol 19 (5) ◽  
pp. 995 ◽  
Author(s):  
Won Choi ◽  
Young Kim ◽  
Hyeong Jo ◽  
Joo Pyun ◽  
Soo Kwon ◽  
...  

Intensive research on photoacoustics (PA) for imaging of the living human body, including the skin, vessels, and tumors, has recently been conducted. We propose a PA measurement system based on a capacitive micromachined ultrasonic transducer (CMUT) with waterless coupling, short measurement time (<1 s), backward light irradiation, and a low-profile ultrasonic receiver unit (<1 cm). We fabricate a 64-element CMUT ring array with 6.2 mm diameter and 10.4 MHz center frequency in air, and 100% yield and uniform element response. To validate the PA tissue characterization, we employ pencil lead and red ink as solid and liquid models, respectively, and a living body to target moles and vessels. The system implements a near-field imaging system consisting of a 6 mm polydimethylsiloxane (PDMS) matching layer between the object and CMUT, which has a 3.7 MHz center frequency in PDMS. Experiments were performed in a waterless contact on the PDMS and the laser was irradiated with a 1 cm diameter. The experimental results show the feasibility of this near-field PA imaging system for position and depth detection of skin, mole, vessel cells, etc. Therefore, a system applicable to a low-profile compact biomedical device is presented.


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