Resolution enhancement technique optimization using model-based full-chip verification methodology for subwavelength lithography

2004 ◽  
Author(s):  
Juhwan Kim ◽  
Minghui Fan ◽  
Lantian Wang ◽  
Timothy Tsuei ◽  
Zongwu Tang
Keyword(s):  
Resolution Enhancement ◽  
Enhancement Technique ◽  
Model Based ◽  
Technique Optimization ◽  
Verification Methodology ◽  
Resolution Enhancement Technique

scholarly journals Resolution Enhancement Technique Using Range Oversampling

2006 ◽  
Vol 23 (2) ◽  
pp. 228-240 ◽  
Author(s):  
Tian-You Yu ◽  
Guifu Zhang ◽  
Anil B. Chalamalasetti ◽  
Richard J. Doviak ◽  
Dusan Zrníc
Keyword(s):  
Weighting Function ◽  
Resolution Enhancement ◽  
Statistical Error ◽  
Redundant Information ◽  
Spectral Moment ◽  
Enhancement Technique ◽  
Ground Clutter ◽  
First Case ◽  
Range Variation ◽  
Resolution Enhancement Technique

Abstract A novel resolution enhancement technique using range oversampling (RETRO) is presented. Oversampled signals are radar returns from shifted and overlapped resolution volumes in range. It has been recently shown that these signals can be whitened and averaged to optimally reduce the statistical error of weather spectral moment estimations for the case of uniform reflectivity and velocity. Using the same oversampled data, when the resolution is of interest, RETRO can reveal the variation of reflectivity and velocity in range at finescale. The idea is to utilize the redundant information contained in oversampled signals, which come from common regions, to improve the resolution defined by the range weighting function. As a result, oversampled data are optimally combined to produce high-resolution signals for spectral moment estimations. RETRO is demonstrated and verified using numerical simulations for two cases. In the first case, range variation of a tornadic vortex with a diameter of 120 m can be reconstructed by RETRO at a scale of 25 m when a 250-m pulse and an oversampling factor of 10 are used. Application of RETRO to mitigate ground clutter contamination is demonstrated in the second case.

A Depth Resolution Enhancement Technique in Fourier Domain Optical Coherence Tomography

2015 ◽  
Vol 35 (3) ◽  
pp. 0311002
Author(s):  
郭昕 Guo Xin ◽  
王向朝 Wang Xiangzhao ◽  
南楠 Nan Nan ◽  
李中梁 Li Zhongliang
Keyword(s):  
Optical Coherence Tomography ◽  
Resolution Enhancement ◽  
Depth Resolution ◽  
Fourier Domain ◽  
Optical Coherence ◽  
Enhancement Technique ◽  
Resolution Enhancement Technique
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