Evaluation of a two-mask resolution enhancement technique
1998 ◽
Vol 16
(6)
◽
pp. 3411
2006 ◽
Vol 23
(2)
◽
pp. 228-240
◽
2005 ◽
Vol 4
(1)
◽
pp. 013001
◽
2008 ◽
Vol 62
(4)
◽
pp. 545-549
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