Fabrication of optical waveguides using laser direct writing method

2004 ◽  
Author(s):  
Sung H. Cho ◽  
Jung Min Kim ◽  
Jae G. Kim ◽  
Won S. Chang ◽  
Eung S. Lee
2020 ◽  
Vol 57 (11) ◽  
pp. 111415
Author(s):  
张彬 Zhang Bin ◽  
李子琦 Li Ziqi ◽  
王磊 Wang Lei ◽  
陈峰 Chen Feng

1990 ◽  
Vol 201 ◽  
Author(s):  
M. Meunier ◽  
C. Lavoie ◽  
S. Boivin ◽  
R. Izquierdo ◽  
P. Desjardins ◽  
...  

AbstractThe deposition of titanium lines by KrF excimer laser direct writing on lithium niobate (LiNbO3) has been investigated. A detailled study of the line profile has been performed since this is critical in the fabrication of Ti:LiNbO3 optical waveguides. We show that at a low power density E, the maximum thickness t is proportional to E, while increasing E leads to the diffusion of Ti into LiNbO3 resulting in a saturation and even a decrease in thickness. Preliminary results on Ti:LiNbO3 optical waveguides show that their characteristics are similar to those made by conventional methods.


2008 ◽  
Author(s):  
Xiaoyan Zeng ◽  
Aikui Li ◽  
Zemin Wang ◽  
Jiajun Liu ◽  
Chunxia Wang ◽  
...  

2019 ◽  
Vol 215 ◽  
pp. 15003
Author(s):  
Vítor A. Amorim ◽  
João M. Maia ◽  
Duarte Viveiros ◽  
P. V. S. Marques

In this work, the fabrication of optical waveguides embedded in fused silica (Suprasil1) and boro-aluminosilicate glass (Eagle2000) is demonstrated with femtosecond laser direct writing, as well as their suitability to be brought to the surface, through wet etching, for enhanced evanescent coupling with the external dielectric medium. Fused silica demonstrated to be inappropriate in this particular application, as the guiding region is at the bottom of the induced modification, creating a barrier between the guided mode and the substrate’s boundary. Furthermore, the existence of nanogratings meant that, upon contact of the top of the induced modification with the substrate’s boundary, the waveguide is quickly etched. Eagle2000 demonstrated to be superior to fused silica due to its characteristic modification cross-section and absence of nanogratings, which allowed the placement of the guiding region as close to the substrate’s surface as required. However, surface roughness arising from the creation of insoluble products in the HF solution was found. The addition of HCl to dissolve these products was implemented.


2014 ◽  
Vol 32 (17) ◽  
pp. 3036-3042 ◽  
Author(s):  
Eugen Zgraggen ◽  
Ibrahim Murat Soganci ◽  
Folkert Horst ◽  
Antonio La Porta ◽  
Roger Dangel ◽  
...  

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