Channel optical waveguides in polyimides for optical interconnection by laser-direct writing and contact printing

1990 ◽  
Author(s):  
Daniel W. Hewak ◽  
Hubert Jerominek
Keyword(s):  
Optical Waveguides ◽  
Optical Interconnection ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Contact Printing

Fabrication of optical waveguides using laser direct writing method

2004 ◽  
Author(s):  
Sung H. Cho ◽  
Jung Min Kim ◽  
Jae G. Kim ◽  
Won S. Chang ◽  
Eung S. Lee
Keyword(s):  
Optical Waveguides ◽  
Direct Writing ◽  
Laser Direct Writing

Research Advances in Laser Crystal Optical Waveguides Fabricated by Femtosecond Laser Direct Writing

2020 ◽  
Vol 57 (11) ◽  
pp. 111415
Author(s):  
张彬 Zhang Bin ◽  
李子琦 Li Ziqi ◽  
王磊 Wang Lei ◽  
陈峰 Chen Feng
Keyword(s):  
Femtosecond Laser ◽  
Optical Waveguides ◽  
Laser Crystal ◽  
Direct Writing ◽  
Laser Direct Writing

KrF Excimer Laser Direct Writing of Titanium Lines: Modeling and Application to the Fabrication of Ti:Linbo3 Waveguides

1990 ◽  
Vol 201 ◽  
Author(s):  
M. Meunier ◽  
C. Lavoie ◽  
S. Boivin ◽  
R. Izquierdo ◽  
P. Desjardins ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Low Power ◽  
Power Density ◽  
Excimer Laser ◽  
Line Profile ◽  
Optical Waveguides ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Preliminary Results ◽  
Krf Excimer Laser

AbstractThe deposition of titanium lines by KrF excimer laser direct writing on lithium niobate (LiNbO3) has been investigated. A detailled study of the line profile has been performed since this is critical in the fabrication of Ti:LiNbO3 optical waveguides. We show that at a low power density E, the maximum thickness t is proportional to E, while increasing E leads to the diffusion of Ti into LiNbO3 resulting in a saturation and even a decrease in thickness. Preliminary results on Ti:LiNbO3 optical waveguides show that their characteristics are similar to those made by conventional methods.

Laser direct writing of SiO 2 /TiO 2 sol-gel films to fabricate stripe optical waveguides

2008 ◽  
Author(s):  
Xiaoyan Zeng ◽  
Aikui Li ◽  
Zemin Wang ◽  
Jiajun Liu ◽  
Chunxia Wang ◽  
...  
Keyword(s):  
Optical Waveguides ◽  
Sol Gel ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Sol Gel Films

scholarly journals Addressing the Fabrication Difficulties of Femtosecond Laser Written Surface Waveguides for Enhanced Evanescent Coupling

2019 ◽  
Vol 215 ◽  
pp. 15003
Author(s):  
Vítor A. Amorim ◽  
João M. Maia ◽  
Duarte Viveiros ◽  
P. V. S. Marques
Keyword(s):  
Femtosecond Laser ◽  
Optical Waveguides ◽  
Dielectric Medium ◽  
Fused Silica ◽  
Wet Etching ◽  
Aluminosilicate Glass ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Guided Mode ◽  
Evanescent Coupling

In this work, the fabrication of optical waveguides embedded in fused silica (Suprasil1) and boro-aluminosilicate glass (Eagle2000) is demonstrated with femtosecond laser direct writing, as well as their suitability to be brought to the surface, through wet etching, for enhanced evanescent coupling with the external dielectric medium. Fused silica demonstrated to be inappropriate in this particular application, as the guiding region is at the bottom of the induced modification, creating a barrier between the guided mode and the substrate’s boundary. Furthermore, the existence of nanogratings meant that, upon contact of the top of the induced modification with the substrate’s boundary, the waveguide is quickly etched. Eagle2000 demonstrated to be superior to fused silica due to its characteristic modification cross-section and absence of nanogratings, which allowed the placement of the guiding region as close to the substrate’s surface as required. However, surface roughness arising from the creation of insoluble products in the HF solution was found. The addition of HCl to dissolve these products was implemented.

Fabrication of 3D Micro Structures on Nonplanar Substrates and Its Applications for Roll Micro contact Printing

2012 ◽  
Vol 1436 ◽  
Author(s):  
Jongho Park ◽  
Hiroyuki Fujita ◽  
Beomjoon Kim
Keyword(s):  
Direct Writing ◽  
Laser Direct Writing ◽  
Contact Printing ◽  
Complex Processes ◽  
Experimental Parameters ◽  
Exposure Method ◽  
Flexible Pressure Sensor ◽  
Micro Structuring ◽  
Micro Structures ◽  
Micro Patterns

ABSTRACTThe purpose of this research is to develop a fabrication technique of microstructures on nonplanar substrates, investigating so called, optical softlithography. In addition, PDMS roller stamps were duplicated from these structures on curved substrates as the mold, roll micro contact printing was performed successfully.Micro structuring on nonplanar substrates has not been fully established yet, although several fabrication methods, such as laser direct writing and modified photolithography, were proposed. Moreover, those techniques require still expensive and complex processes. To overcome those drawbacks, optical softlithography using flexible photomasks was developed [1]. Firstly, SU-8 micro structures were fabricated on concave substrates by optical softlithography using PDMS flexible photomasks. As a result, SU-8 structures with 2.5 μm line width and high aspect ratio over 7.9 were fabricated on a concave substrate. Also, experimental parameters for optical softlithography were investigated and established for further fabrications and applications. In addition, the tilting structures were confirmed due to the vertical UV exposure method.Next, Based on these novel 3D patterning technologies, PDMS roller stamps were fabricated and roll micro contact printing was performed. The roll micro contact printing was investigated by using the customized roll micro contact printing apparatus and the flexible pressure sensor system. We expect this technique can provide various sized roller stamps with various micro patterns for μCP process as well as roll micro contact printing process.

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