Dual-technology optical sensor head for 3D surface shape measurements on the micro- and nanoscales

2004 ◽  
Author(s):  
Roger Artigas ◽  
Ferran Laguarta ◽  
Cristina Cadevall
Keyword(s):  
Optical Sensor ◽  
Surface Shape ◽  
Sensor Head ◽  
3D Surface

scholarly journals Aging and the haptic perception of 3D surface shape

2010 ◽  
Vol 73 (3) ◽  
pp. 908-918 ◽  
Author(s):  
J. Farley Norman ◽  
Astrid M. L. Kappers ◽  
Amanda M. Beers ◽  
A. Kate Scott ◽  
Hideko F. Norman ◽  
...  
Keyword(s):  
Haptic Perception ◽  
Surface Shape ◽  
3D Surface

A Refractometer with a Fully Packaged Integrated Optical Sensor Head

1989 ◽  
pp. 443-447 ◽  
Author(s):  
W. Konz ◽  
A. Brandenburg ◽  
R. Edelhäuser ◽  
W. Ott ◽  
H. Wölfelschneider
Keyword(s):  
Optical Sensor ◽  
Sensor Head ◽  
Integrated Optical ◽  
Integrated Optical Sensor

Simultaneous high-speed measurement of 3D surface shape and temperature

2019 ◽  
Author(s):  
Martin Landmann ◽  
Stefan Heist ◽  
Patrick Dietrich ◽  
Peter Lutzke ◽  
Ingo Gebhart ◽  
...  
Keyword(s):  
High Speed ◽  
Surface Shape ◽  
Speed Measurement ◽  
3D Surface

scholarly journals Inferring 3D Surface Shape from 2D Contour Curvature

2012 ◽  
Vol 12 (9) ◽  
pp. 226-226
Author(s):  
W. J. Adams ◽  
E. W. Graf ◽  
J. H. Elder ◽  
J. A. E. Josephs
Keyword(s):  
Surface Shape ◽  
3D Surface ◽  
Contour Curvature

High-speed 3D surface measurement with a fringe projection based optical sensor

2014 ◽  
Author(s):  
Christian Bräuer-Burchardt ◽  
Stefan Heist ◽  
Peter Kühmstedt ◽  
Gunther Notni
Keyword(s):  
Optical Sensor ◽  
High Speed ◽  
Fringe Projection ◽  
Surface Measurement ◽  
3D Surface

A Three-Axis Angle Sensor with a Linear Encoder Scale Reflector

2017 ◽  
Vol 870 ◽  
pp. 141-146 ◽  
Author(s):  
Yuki Shimizu ◽  
Taiji Maruyama ◽  
So Ito ◽  
Wei Gao
Keyword(s):  
Optical Sensor ◽  
Diffraction Grating ◽  
Angle Sensor ◽  
Sensor Head ◽  
First Order ◽  
Autocollimation Method ◽  
Linear Encoder ◽  
Optical Configuration ◽  
Stage System ◽  
Long Stroke

This paper presents a design study of an optical three-axis angle sensor for measurement of angular error motions of long-stroke precision linear stages. The three-axis angle sensor, which is based on a laser autocollimation method, can detect angular motions about the XYZ-axes simultaneously by using zeroth-and first-order diffraction beams from a diffraction grating mounted on a measuring target as a reflector. In this paper, an optical sensor head is designed in such a way that the three-axis angle sensor shares a diffraction grating with an optical sensor head of a linear encoder, which is already installed in a stage system. The optical sensor head of the three-axis angle sensor is designed in a size of smaller than 50 mm × 30 mm × 30 mm so that the sensor head can be compatible with the linear encoder. Details of the optical configuration designed for the sensor head, and some results of experiments are reported.

scholarly journals Integration of motion and disparity in reconstructing 3D surface shape

2010 ◽  
Vol 6 (6) ◽  
pp. 346-346
Author(s):  
K. J. Mackenzie ◽  
L. M. Wilcox ◽  
M. Jovanovic
Keyword(s):  
Surface Shape ◽  
3D Surface
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