Two threshold resist models for optical proximity correction

2004 ◽  
Author(s):  
Wen-Chun Huang ◽  
Chia-Hui Lin ◽  
Chin-Chen Kuo ◽  
C. C. Huang ◽  
J. F. Lin ◽  
...  
Keyword(s):  
Optical Proximity Correction

Localization Techniques on a 0.15um CMOS Device: Charge Pump Failure Analysis

2002 ◽  
Author(s):  
Hui Pan ◽  
Thomas Gibson
Keyword(s):  
Failure Analysis ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Electrical Characterization ◽  
Charge Pump ◽  
Front Side ◽  
Pump Failure ◽  
Electrical Failure ◽  
Optical Proximity Correction ◽  
A Charge

Abstract In recent years, there have been many advances in the equipment and techniques used to isolate faults. There are many options available to the failure analyst. The available techniques fall into the categories of electrical, photonic, thermal and electron/ion beam [1]. Each technique has its advantages and its limitations. In this paper, we introduce a case of successful failure analysis using a combination of several fault localization techniques on a 0.15um CMOS device with seven layers of metal. It includes electrical failure mode characterization, front side photoemission, backside photoemission, Focused Ion Beam (FIB), Scanning Electron Microscope (SEM) and liquid crystal. Electrical characterization along with backside photoemission proved most useful in this case as a poly short problem was found to be causing a charge pump failure. A specific type of layout, often referred to as a hammerhead layout, and the use of Optical Proximity Correction (OPC) contributed to the poly level shorts.

Optical proximity correction of bit line pattern in DRAM devices

1996 ◽  
Author(s):  
Yongbeom Kim ◽  
Chang-Jin Sohn ◽  
Hoyoung Kang ◽  
Woo-Sung Han ◽  
Young-Bum Koh
Keyword(s):  
Line Pattern ◽  
Optical Proximity Correction

Automatic parallel optical proximity correction and verification system

2000 ◽  
Author(s):  
Takahiro Watanabe ◽  
Eiji Tsujimoto ◽  
Kyoji Nakajo ◽  
Keiji Maeda
Keyword(s):  
Optical Proximity Correction ◽  
Verification System

Automated optical proximity correction: a rules-based approach

1994 ◽  
Author(s):  
Oberdan W. Otto ◽  
Joseph G. Garofalo ◽  
K. K. Low ◽  
Chi-Min Yuan ◽  
Richard C. Henderson ◽  
...  
Keyword(s):  
Optical Proximity Correction

scholarly journals Optical Proximity Correction using an Optimization Method after Layout Design

2007 ◽  
Vol 127 (1) ◽  
pp. 1-9
Author(s):  
Tetsuaki Matsunawa ◽  
Hirokazu Nosato ◽  
Hidenori Sakanashi ◽  
Masahiro Murakawa ◽  
Nobuharu Murata ◽  
...  
Keyword(s):  
Optimization Method ◽  
Layout Design ◽  
Optical Proximity Correction

Automatic optical proximity correction with optimization of stepper condition

1995 ◽  
Author(s):  
Soichi Inoue ◽  
Tadahito Fujisawa ◽  
Satoshi Tanaka ◽  
Shoji Mimotogi ◽  
Akiko Nikki ◽  
...  
Keyword(s):  
Optical Proximity Correction
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