scholarly journals Study of air-bubble-induced light scattering effect on image quality in 193-nm immersion lithography

2004 ◽  
Author(s):  
Yongfa Fan ◽  
Neal V. Lafferty ◽  
Anatoly Bourov ◽  
Lena V. Zavyalova ◽  
Bruce W. Smith
Keyword(s):  
Light Scattering ◽  
Image Quality ◽  
Air Bubble ◽  
Immersion Lithography ◽  
Scattering Effect ◽  
193 Nm ◽  
Light Scattering Effect

Air bubble-induced light-scattering effect on image quality in 193 nm immersion lithography

2005 ◽  
Vol 44 (19) ◽  
pp. 3904 ◽  
Author(s):  
Yongfa Fan ◽  
Neal Lafferty ◽  
Anatoly Bourov ◽  
Lena Zavyalova ◽  
Bruce W. Smith
Keyword(s):  
Light Scattering ◽  
Image Quality ◽  
Air Bubble ◽  
Immersion Lithography ◽  
Scattering Effect ◽  
193 Nm ◽  
Light Scattering Effect

A ZnO nanorod layer with a superior light-scattering effect for dye-sensitized solar cells

RSC Advances ◽  
2013 ◽  
Vol 3 (40) ◽  
pp. 18537 ◽  
Author(s):  
Rui Gao ◽  
Zhiqiang Liang ◽  
Jianjun Tian ◽  
Qifeng Zhang ◽  
Liduo Wang ◽  
...  
Keyword(s):  
Solar Cells ◽  
Light Scattering ◽  
Dye Sensitized Solar Cells ◽  
Zno Nanorod ◽  
Dye Sensitized ◽  
Scattering Effect ◽  
Sensitized Solar Cells ◽  
Light Scattering Effect
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