Extending aggressive low-k1 design rule requirements for 90-nm and 65-nm nodes via simultaneous optimization of NA, illumination, and OPC

2004 ◽  
Author(s):  
Sabita Roy ◽  
Douglas J. Van Den Broeke ◽  
J. F. Chen ◽  
Armin Liebchen ◽  
Ting Chen ◽  
...  
Keyword(s):  
Simultaneous Optimization ◽  
Design Rule

Determination of Combined and Second Order Factor Effects for Simultaneous Optimization of Physical and Mechanical Properties of NR/BR Blend System

2014 ◽  
Vol 42 (4) ◽  
pp. 290-304
Author(s):  
Rajarajan Aiyengar ◽  
Jyoti Divecha
Keyword(s):  
Physical And Mechanical Properties ◽  
Second Order ◽  
Simultaneous Optimization ◽  
Order Effects ◽  
Elongation At Break ◽  
Five Factors ◽  
Rubber Compounds ◽  
Polybutadiene Rubber ◽  
Contour Plots

ABSTRACT The blends of natural rubber (NR), polybutadiene rubber (BR), and other forms of rubbers are widely used for enhancing the mechanical and physical properties of rubber compounds. Lots of work has been done in conditioning and mixing of NR/BR blends to improve the properties of its rubber compounds and end products such as tire tread. This article employs response surface methodology designed experiments in five factors; high abrasion furnace carbon black (N 330), aromatic oil, NR/BR ratio, sulfur, and N-oxydiethylene-2-benzothiazole sulfenamide for determination of combined and second order effects of the significant factors leading to simultaneous optimization of the NR/BR blend system. One of the overall optimum of eight properties existed at carbon 44 phr, oil 6.1 phr, NR/BR 78/22 phr with the following values of properties: tensile strength (22 MPa), elongation at break (528%), tear resistance (30 kg/mm), rebound resilience (67%), moderate hardness (68 International rubber hardness degrees) with low heat buildup (17 °C), permanent set (12%), and abrasion loss (57 mm3). More optimum combinations can easily be determined from the NR/BR blend system models contour plots.

FIDDLE. Simultaneous Indexing and Structure Solution from Powder Diffraction Data using a Genetic Algorithm and Correlation Functions

2019 ◽  
Author(s):  
Carmen Guguta ◽  
Jan M.M. Smits ◽  
Rene de Gelder
Keyword(s):  
Genetic Algorithm ◽  
Powder Diffraction ◽  
Diffraction Data ◽  
Correlation Functions ◽  
Cross Correlation ◽  
Simultaneous Optimization ◽  
Powder Diffraction Data ◽  
Structure Solution ◽  
Matching Technique

A method for the determination of crystal structures from powder diffraction data is presented that circumvents the difficulties associated with separate indexing. For the simultaneous optimization of the parameters that describe a crystal structure a genetic algorithm is used together with a pattern matching technique based on auto and cross correlation functions.<br>

Failure Types & Analysis In Cu Process Development of Design-Rule 0.18μm CPU

2001 ◽  
Author(s):  
DongKwon Jeong ◽  
JuHyeon Ahn ◽  
SangIn Lee ◽  
JooHyuk Chung ◽  
ByungLyul Park ◽  
...  
Keyword(s):  
Process Improvement ◽  
Process Development ◽  
Metal Corrosion ◽  
Pass Rate ◽  
Design Rule ◽  
The Novel ◽  
Corrosion Loss ◽  
Barrier Metal ◽  
Development State ◽  
Failure Types

Abstract This paper presents the problems, the solutions, and the development state of the novel 0.18 μm Cu Metal Process through failure analysis of the Alpha CPU under development at Samsung Electronics. The presented problems include : “Via Bottom Lifting” induced by the Cu Via void, “Via Bottom dissociation” due to the IMD stress, “Via side dissociation” due to the poor formation of the Barrier Metal, “Via short/not-open failure” due to the IMD lifting, and Cu metal Corrosion/Loss. The analysis was carried out on the Via Contact Test Chain Patterns, using the “Electron (ION) Charge Up” method. After carefully analyzing each of the failure types, process improvement efforts followed. As a result, the pass rate of the via contact Rc was brought up from a mere 20% to 95%, and the device speed higher than 1.1 GHz was achieved, which surpasses the target speed of 1 GHz.

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